Inventor · disambiguated record
Fumito Kagami
Also filed as: KAGAMI FUMITO
7 granted patents·91 citations·filing 1992–2021
83Inventor score
Top patents by PatentIndex Score
7 records- 0188US11894256B2Substrate holding mechanism, substrate mounting method, and substrate detaching methodTOKYO ELECTRON LTD·Filed 2021·Granted Feb 6, 2024·2 cites·8 claims
- 0288US7701236B2Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a waferTOKYO ELECTRON LTD·Filed 2008·Granted Apr 20, 2010·16 cites·17 claims
- 0379US7583099B2Method for re-registering an object to be aligned by re-capturing images using previously registered conditions and storage medium storing a program for executing the methodTOKYO ELECTRON LTD·Filed 2007·Granted Sep 1, 2009·9 cites·5 claims
- 0468US5264918AMethod and device for detecting the center of a waferTEL YAMANISHI KK·Filed 1992·Granted Nov 23, 1993·55 cites·17 claims
- 0567US8098412B2Method for detecting the center of wafer and storage medium storing a program for executing the methodKAGAMI FUMITO·Filed 2007·Granted Jan 17, 2012·5 cites·10 claims
- 0660US12106997B2Test device, change kit, and method of exchanging change kitTOKYO ELECTRON LTD·Filed 2021·Granted Oct 1, 2024·0 cites·8 claims
- 0760US7724007B2Probe apparatus and probing methodTOKYO ELECTRON LTD·Filed 2008·Granted May 25, 2010·4 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →