Inventor · disambiguated record
Glen F. R. Gilchrist
Also filed as: GILCHRIST GLEN · GILCHRIST GLEN F R
10 granted patents·5 pending applications·31 citations·filing 2005–2025
85Inventor score
Files withAPPLIED MATERIALS INC9AXCELIS TECH INC2VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2BROOKS AUTOMATION INC1LAM RES CORP1
Top patents by PatentIndex Score
15 records- 0194US9706634B2Apparatus and techniques to treat substrates using directional plasma and reactive gasVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jul 11, 2017·12 cites·14 claims
- 0292US10840132B1Methods for forming elongated contact hole endsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 17, 2020·6 cites·20 claims
- 0391US11335590B2Methods for forming elongated contact hole endsAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·2 cites·20 claims
- 0480US2025104976A1Recombination channels for angle control of neutral reactive speciesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0577US7289863B2System and method for electronic diagnostics of a process vacuum environmentBROOKS AUTOMATION INC·Filed 2005·Granted Oct 30, 2007·9 cites·44 claims
- 0676US11842923B2Methods for forming elongated contact hole endsAPPLIED MATERIALS INC·Filed 2022·Granted Dec 12, 2023·0 cites·19 claims
- 0774US10699871B2System and method for spatially resolved optical metrology of an ion beamAPPLIED MATERIALS INC·Filed 2018·Granted Jun 30, 2020·1 cites·20 claims
- 0869US2023369022A1Recombination channels for angle control of neutral reactive speciesAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0967US10128082B2Apparatus and techniques to treat substrates using directional plasma and point of use chemistryVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Nov 13, 2018·1 cites·11 claims
- 1063US2025293006A1Apparatus and Method for Angle Control of Radicals, Neutral Atoms, and MoleculesAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 1159US11881378B2Angle control for neutral reactive species generated in a plasmaAPPLIED MATERIALS INC·Filed 2022·Granted Jan 23, 2024·0 cites·20 claims
- 1255US2025297356A1Method and apparatus for ion beam directional depositionAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 1353US11361968B2Atomic layer deposition using a substrate scanning systemAPPLIED MATERIALS INC·Filed 2020·Granted Jun 14, 2022·0 cites·17 claims
- 1446US9740104B2Plasma dry strip pretreatment to enhance ion implanted resist removalLAM RES CORP·Filed 2014·Granted Aug 22, 2017·0 cites·11 claims
- 1541US2021159068A1Low volatility material removal from a semiconductor deviceAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →