Inventor · disambiguated record
Gopu Krishna
Also filed as: KRISHNA GOPU
5 granted patents·3 pending applications·8 citations·filing 2018–2025
69Inventor score
Top patents by PatentIndex Score
8 records- 0194US11501957B2Pedestal support design for precise chamber matching and process controlAPPLIED MATERIALS INC·Filed 2020·Granted Nov 15, 2022·4 cites·17 claims
- 0275US12249501B2Susceptor manufacturing method and the manufactured susceptor using the sameASM IP HOLDING BV·Filed 2024·Granted Mar 11, 2025·0 cites·7 claims
- 0375US10679827B2Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformityAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·3 cites·22 claims
- 0471US11098404B2Multi-station chamber lid with precise temperature and flow controlAPPLIED MATERIALS INC·Filed 2019·Granted Aug 24, 2021·1 cites·17 claims
- 0564US2025246391A1Susceptor manufacturing method and the manufactured susceptor using the sameASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0656US2025132131A1Plasma modulation apparatus for substrate processing systemASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0743US11610800B2Capacitive method of detecting wafer chucking and de-chuckingAPPLIED MATERIALS INC·Filed 2021·Granted Mar 21, 2023·0 cites·20 claims
- 0842US2021159094A1Universal adjustable blocker plate for flow distribution tuningAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →