Inventor · disambiguated record
Govinda Raj
Also filed as: RAJ GOVINDA
32 granted patents·2 pending applications·860 citations·filing 1990–2024
96Inventor score
Top patents by PatentIndex Score
34 records- 0198US10648788B2Substrate distance monitoringAPPLIED MATERIALS INC·Filed 2017·Granted May 12, 2020·337 cites·20 claims
- 0296US10190701B2Corrosion control for chamber componentsAPPLIED MATERIALS INC·Filed 2016·Granted Jan 29, 2019·367 cites·19 claims
- 0393US9349630B2Methods and apparatus for electrostatic chuck repair and refurbishmentAPPLIED MATERIALS INC·Filed 2014·Granted May 24, 2016·14 cites·5 claims
- 0493US5120776AProcess for chemical treatment of discontinuous cellulosic fibers and composites of polyethylene and treated fibersRAJ GOVINDA·Filed 1990·Granted Jun 9, 1992·118 cites·9 claims
- 0589US11114326B2Substrate chucking and dechucking methodsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·6 cites·12 claims
- 0686US12424413B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2024·Granted Sep 23, 2025·0 cites·17 claims
- 0783US11915913B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 0883US9613846B2Pad design for electrostatic chuck surfaceAPPLIED MATERIALS INC·Filed 2014·Granted Apr 4, 2017·5 cites·9 claims
- 0981US10879046B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2015·Granted Dec 29, 2020·2 cites·16 claims
- 1080US11560913B2Brazed joint and semiconductor processing chamber component having the sameAPPLIED MATERIALS INC·Filed 2019·Granted Jan 24, 2023·2 cites·15 claims
- 1176US10290459B2Magnetron having enhanced cooling characteristicsAPPLIED MATERIALS INC·Filed 2018·Granted May 14, 2019·1 cites·20 claims
- 1274US11676802B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2020·Granted Jun 13, 2023·0 cites·11 claims
- 1374US11330673B2Heated substrate supportAPPLIED MATERIALS INC·Filed 2018·Granted May 10, 2022·1 cites·19 claims
- 1473US11761901B2Apparatus and method for inspecting lampsAPPLIED MATERIALS INC·Filed 2022·Granted Sep 19, 2023·0 cites·30 claims
- 1571US12309888B2Heated substrate supportAPPLIED MATERIALS INC·Filed 2022·Granted May 20, 2025·0 cites·20 claims
- 1671US10168229B2EMI/RF shielding of thermocouplesAPPLIED MATERIALS INC·Filed 2017·Granted Jan 1, 2019·1 cites·17 claims
- 1770US11460413B2Apparatus and method for inspecting lampsAPPLIED MATERIALS INC·Filed 2021·Granted Oct 4, 2022·0 cites·20 claims
- 1870US2025132186A1Substrate support designs for a deposition chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1969US10049908B2Methods and apparatus for electrostatic chuck repair and refurbishmentAPPLIED MATERIALS INC·Filed 2016·Granted Aug 14, 2018·1 cites·20 claims
- 2068US10553473B2Edge ring for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2015·Granted Feb 4, 2020·1 cites·20 claims
- 2168US10177014B2Thermal radiation barrier for substrate processing chamber componentsAPPLIED MATERIALS INC·Filed 2013·Granted Jan 8, 2019·2 cites·18 claims
- 2267US10662529B2Cooled gas feed block with baffle and nozzle for HDP-CVDAPPLIED MATERIALS INC·Filed 2016·Granted May 26, 2020·1 cites·20 claims
- 2363US11417561B2Edge ring for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Aug 16, 2022·0 cites·13 claims
- 2459US11569069B23D printed chamber components configured for lower film stress and lower operating temperatureAPPLIED MATERIALS INC·Filed 2020·Granted Jan 31, 2023·0 cites·14 claims
- 2557US10141153B2Magnetron having enhanced cooling characteristicsAPPLIED MATERIALS INC·Filed 2016·Granted Nov 27, 2018·0 cites·17 claims
- 2656US9823133B2EMI/RF shielding of thermocouplesRAJ GOVINDA·Filed 2010·Granted Nov 21, 2017·1 cites·20 claims
- 2753US12027388B2Conical coil for rapid thermal anneal lampsAPPLIED MATERIALS INC·Filed 2020·Granted Jul 2, 2024·0 cites·20 claims
- 2851US10777391B23D printed chamber components configured for lower film stress and lower operating temperatureAPPLIED MATERIALS INC·Filed 2016·Granted Sep 15, 2020·0 cites·21 claims
- 2950US12198967B2Substrate support designs for a deposition chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jan 14, 2025·0 cites·19 claims
- 3050US11054317B2Method and apparatus for direct measurement of chucking force on an electrostatic chuckAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·0 cites·17 claims
- 3147US10005025B2Corrosion resistant abatement systemAPPLIED MATERIALS INC·Filed 2015·Granted Jun 26, 2018·0 cites·10 claims
- 3238US11694879B2Component, method of manufacturing the component, and method of cleaning the componentAPPLIED MATERIALS INC·Filed 2019·Granted Jul 4, 2023·0 cites·19 claims
- 3336US10515843B2Amalgamated cover ringAPPLIED MATERIALS INC·Filed 2016·Granted Dec 24, 2019·0 cites·20 claims
- 3433US2016230269A1Radially outward pad design for electrostatic chuck surfaceAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →