Inventor · disambiguated record
Gregory J. Goldspring
Also filed as: GOLDSPRING GREGORY J · GOLDSPRING GREGORY JAMES
8 granted patents·1 pending application·151 citations·filing 1996–2007
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0196US8292698B1On-line chamber cleaning using dry ice blastingSHIH HONG·Filed 2007·Granted Oct 23, 2012·67 cites·20 claims
- 0273US5883007AMethods and apparatuses for improving photoresist selectivity and reducing etch rate loadingLAM RES CORP·Filed 1996·Granted Mar 16, 1999·46 cites·14 claims
- 0370US6475298B1Post-metal etch treatment to prevent corrosionLAM RES CORP·Filed 2000·Granted Nov 5, 2002·14 cites·14 claims
- 0468US6774045B1Residual halogen reduction with microwave stripperLAM RES CORP·Filed 2002·Granted Aug 10, 2004·12 cites·18 claims
- 0551US7270760B2Method and apparatus for simulating standard test wafersLAM RES CORP·Filed 2005·Granted Sep 18, 2007·0 cites·20 claims
- 0639US2001054600A1Method and apparatus for simulating standard test wafersFiled 2001·Application pending·0 cites
- 0737US6069035ATechniques for etching a transition metal-containing layerLAM RESEARH CORP·Filed 1997·Granted May 30, 2000·10 cites·28 claims
- 0830US6296778B1Method and apparatus for simulating standard test wafersLAM RES CORP·Filed 1999·Granted Oct 2, 2001·1 cites·19 claims
- 0925US6306312B1Method for etching a gold metal layer using a titanium hardmaskLAM RES CORP·Filed 1999·Granted Oct 23, 2001·1 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →