Inventor · disambiguated record
Harry J. Levinson
Also filed as: LEVINSON HARRY · LEVINSON HARRY J · LEVINSON HARRY JAY
78 granted patents·5 pending applications·2,479 citations·filing 1985–2016
99Inventor score
Top patents by PatentIndex Score
83 records- 0199US6716571B2Selective photoresist hardening to facilitate lateral trimmingADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 6, 2004·545 cites·24 claims
- 0298US7315033B1Method and apparatus for reducing biological contamination in an immersion lithography systemADVANCED MICRO DEVICES INC·Filed 2005·Granted Jan 1, 2008·65 cites·20 claims
- 0398US6623893B1Pellicle for use in EUV lithography and a method of making such a pellicleADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 23, 2003·115 cites·20 claims
- 0497US9437588B1Middle of-line architecture for dense library layout using M0 hand-shakeGLOBALFOUNDRIES INC·Filed 2015·Granted Sep 6, 2016·26 cites·13 claims
- 0597US8954913B1Methods of generating circuit layouts that are to be manufactured using SADP routing techniques and virtual non-mandrel mask rulesGLOBALFOUNDRIES INC·Filed 2013·Granted Feb 10, 2015·43 cites·12 claims
- 0696US9431300B1MOL architecture enabling ultra-regular cross coupleGLOBALFOUNDRIES INC·Filed 2015·Granted Aug 30, 2016·18 cites·20 claims
- 0796US6184128B1Method using a thin resist mask for dual damascene stop layer etchADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 6, 2001·139 cites·20 claims
- 0895US8921225B2Method for off-grid routing structures utilizing self aligned double patterning (SADP) technologyGLOBALFOUNDRIES INC·Filed 2013·Granted Dec 30, 2014·19 cites·12 claims
- 0994US9147653B2Method for off-grid routing structures utilizing self aligned double patterning (SADP) technologyGLOBALFOUNDRIES INC·Filed 2014·Granted Sep 29, 2015·12 cites·20 claims
- 1094US8741763B2Layout designs with via routing structuresMA YUANSHENG·Filed 2012·Granted Jun 3, 2014·38 cites·17 claims
- 1194US6098408ASystem for controlling reflection reticle temperature in microlithographyADVANCED MICRO DEVICES INC·Filed 1998·Granted Aug 8, 2000·111 cites·25 claims
- 1293US8918746B1Cut mask aware contact enclosure rule for grating and cut patterning solutionGLOBALFOUNDRIES INC·Filed 2013·Granted Dec 23, 2014·19 cites·20 claims
- 1393US6984475B1Extreme ultraviolet (EUV) lithography masksADVANCED MICRO DEVICES INC·Filed 2003·Granted Jan 10, 2006·51 cites·20 claims
- 1493US6645679B1Attenuated phase shift mask for use in EUV lithography and a method of making such a maskADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 11, 2003·51 cites·20 claims
- 1592US6440640B1Thin resist with transition metal hard mask for via etch applicationADVANCED MICRO DEVICES INC·Filed 2000·Granted Aug 27, 2002·53 cites·20 claims
- 1689US9536778B2Self-aligned double patterning process for metal routingGLOBALFOUNDRIES INC·Filed 2015·Granted Jan 3, 2017·6 cites·16 claims
- 1789US7061578B2Method and apparatus for monitoring and controlling imaging in immersion lithography systemsADVANCED MICRO DEVICES INC·Filed 2003·Granted Jun 13, 2006·31 cites·22 claims
- 1889US6593035B1Pellicle for use in small wavelength lithography and a method for making such a pellicle using polymer filmsADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 15, 2003·33 cites·20 claims
- 1988US8839168B2Self-aligned double patterning via enclosure designGLOBALFOUNDRIES INC·Filed 2013·Granted Sep 16, 2014·11 cites·20 claims
- 2088US6020269AUltra-thin resist and nitride/oxide hard mask for metal etchADVANCED MICRO DEVICES INC·Filed 1998·Granted Feb 1, 2000·92 cites·20 claims
- 2187US9547232B2Pellicle with aerogel support frameGLOBALFOUNDRIES INC·Filed 2014·Granted Jan 17, 2017·4 cites·20 claims
- 2286US9330221B2Mask-aware routing and resulting deviceGLOBALFOUNDRIES INC·Filed 2014·Granted May 3, 2016·9 cites·15 claims
- 2386US9093481B2Method for semiconductor wafer fabrication utilizing a cleaning substrateLEVINSON HARRY J·Filed 2007·Granted Jul 28, 2015·13 cites·13 claims
- 2486US7014966B2Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systemsADVANCED MICRO DEVICES INC·Filed 2003·Granted Mar 21, 2006·29 cites·22 claims
- 2586US7006209B2Method and apparatus for monitoring and controlling imaging in immersion lithography systemsADVANCED MICRO DEVICES INC·Filed 2003·Granted Feb 28, 2006·26 cites·17 claims
- 2686US6608321B1Differential wavelength inspection systemADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 19, 2003·34 cites·20 claims
- 2785US6556286B1Inspection system for the pupil of a lithographic toolADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 29, 2003·24 cites·20 claims
- 2884US6159643AExtreme ultraviolet lithography reflective maskADVANCED MICRO DEVICES INC·Filed 1999·Granted Dec 12, 2000·52 cites·27 claims
- 2983US6515272B1Method and apparatus for improving signal to noise ratio of an aerial image monitorADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 4, 2003·30 cites·13 claims
- 3082US8966412B1Methods of generating circuit layouts that are to be manufactured using SADP techniquesGLOBALFOUNDRIES INC·Filed 2013·Granted Feb 24, 2015·6 cites·19 claims
- 3182US7199994B1Method and system for flattening a reticle within a lithography systemADVANCED MICRO DEVICES INC·Filed 2004·Granted Apr 3, 2007·20 cites·17 claims
- 3282US6710853B1Phase grating focus monitor using overlay techniqueADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 23, 2004·22 cites·15 claims
- 3382US5748323AMethod and apparatus for wafer-focusingADVANCED MICRO DEVICES INC·Filed 1997·Granted May 5, 1998·46 cites·12 claims
- 3481US6593037B1EUV mask or reticle having reduced reflectionsADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 15, 2003·30 cites·22 claims
- 3580US9613177B2Methods of generating circuit layouts that are to be manufactured using SADP routing techniquesGLOBALFOUNDRIES INC·Filed 2014·Granted Apr 4, 2017·4 cites·16 claims
- 3680US6309926B1Thin resist with nitride hard mask for gate etch applicationADVANCED MICRO DEVICES INC·Filed 1998·Granted Oct 30, 2001·58 cites·28 claims
- 3779US6544693B2Pellicle for use in small wavelength lithography and a method for making such a pellicleADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 8, 2003·16 cites·24 claims
- 3879US6165695AThin resist with amorphous silicon hard mask for via etch applicationADVANCED MICRO DEVICES INC·Filed 1998·Granted Dec 26, 2000·57 cites·32 claims
- 3978US6127070AThin resist with nitride hard mask for via etch applicationADVANCED MICRO DEVICES INC·Filed 1998·Granted Oct 3, 2000·53 cites·2 claims
- 4076US9798852B2Methods of design rule checking of circuit designsGLOBALFOUNDRIES INC·Filed 2016·Granted Oct 24, 2017·2 cites·20 claims
- 4175US7851136B2Stabilization of deep ultraviolet photoresistGLOBALFOUNDRIES INC·Filed 2006·Granted Dec 14, 2010·4 cites·17 claims
- 4275US6535280B1Phase-shift-moiré focus monitorADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 18, 2003·14 cites·14 claims
- 4375US6200907B1Ultra-thin resist and barrier metal/oxide hard mask for metal etchADVANCED MICRO DEVICES INC·Filed 1998·Granted Mar 13, 2001·46 cites·20 claims
- 4475US6178221B1Lithography reflective maskADVANCED MICRO DEVICES INC·Filed 1998·Granted Jan 23, 2001·62 cites·21 claims
- 4574US7986146B2Method and system for detecting existence of an undesirable particle during semiconductor fabricationGLOBALFOUNDRIES INC·Filed 2006·Granted Jul 26, 2011·4 cites·15 claims
- 4674US6399401B1Test structures for electrical linewidth measurement and processes for their formationADVANCED MICRO DEVICES IN·Filed 2001·Granted Jun 4, 2002·17 cites·20 claims
- 4774US6140023AMethod for transferring patterns created by lithographyADVANCED MICRO DEVICES INC·Filed 1998·Granted Oct 31, 2000·33 cites·30 claims
- 4873US6627355B2Method of and system for improving stability of photomasksADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 30, 2003·13 cites·20 claims
- 4971US8809184B2Methods of forming contacts for semiconductor devices using a local interconnect processing schemeYUAN LEI·Filed 2012·Granted Aug 19, 2014·3 cites·14 claims
- 5071US6171763B1Ultra-thin resist and oxide/nitride hard mask for metal etchADVANCED MICRO DEVICES INC·Filed 1998·Granted Jan 9, 2001·38 cites·26 claims
Showing the top 50 of 83 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →