Inventor · disambiguated record
Hari Pathangi
Also filed as: PATHANGI HARI · PATHANGI HARI SRIRAMAN
5 granted patents·44 citations·filing 2018–2021
74Inventor score
Top patents by PatentIndex Score
5 records- 0194US10473460B2Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signalsKLA TENCOR CORP·Filed 2018·Granted Nov 12, 2019·20 cites·35 claims
- 0288US10672588B1Using deep learning based defect detection and classification schemes for pixel level image quantificationKLA TENCOR CORP·Filed 2019·Granted Jun 2, 2020·23 cites·18 claims
- 0373US11600497B2Using absolute Z-height values for synergy between toolsKLA CORP·Filed 2020·Granted Mar 7, 2023·1 cites·14 claims
- 0454US11631602B2Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processesKLA CORP·Filed 2021·Granted Apr 18, 2023·0 cites·13 claims
- 0540US11035666B2Inspection-guided critical site selection for critical dimension measurementKLA TENCOR CORP·Filed 2018·Granted Jun 15, 2021·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →