Inventor · disambiguated record
Haruhiko Yoshioka
Also filed as: YOSHIOKA HARUHIKO
15 granted patents·1 pending application·1,268 citations·filing 1987–2005
95Inventor score
Files withTOKYO ELECTRON LTD16
Top patents by PatentIndex Score
16 records- 0196US5804983AProbe apparatus with tilt correction mechanismsTOKYO ELECTRON LTD·Filed 1997·Granted Sep 8, 1998·212 cites·6 claims
- 0295US4812201AMethod of ashing layers, and apparatus for ashing layersTOKYO ELECTRON LTD·Filed 1987·Granted Mar 14, 1989·481 cites·4 claims
- 0394US6927587B2Probe apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Aug 9, 2005·76 cites·13 claims
- 0494US5642056AProbe apparatus for correcting the probe card posture before testingTOKYO ELECTRON LTD·Filed 1994·Granted Jun 24, 1997·182 cites·12 claims
- 0592US6933736B2ProberTOKYO ELECTRON LTD·Filed 2003·Granted Aug 23, 2005·62 cites·7 claims
- 0691US7106082B2Stage driving apparatus and probe methodTOKYO ELECTRON LTD·Filed 2005·Granted Sep 12, 2006·20 cites·13 claims
- 0790US5640101AProbe system and probe methodTOKYO ELECTRON LTD·Filed 1996·Granted Jun 17, 1997·90 cites·12 claims
- 0886US6140828AProber and probe methodTOKYO ELECTRON LTD·Filed 1998·Granted Oct 31, 2000·58 cites·9 claims
- 0976US6634245B1Drivingly rotatable mechanism of specimen loading table and specimen loading mechanismTOKYO ELECTRON LTD·Filed 2000·Granted Oct 21, 2003·19 cites·13 claims
- 1069US5585738AProbe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustmentTOKYO ELECTRON LTD·Filed 1995·Granted Dec 17, 1996·30 cites·16 claims
- 1166US6850052B2Probing methodTOKYO ELECTRON LTD·Filed 2002·Granted Feb 1, 2005·10 cites·6 claims
- 1260US7221176B2Vacuum prober and vacuum probe methodTOKYO ELECTRON LTD·Filed 2005·Granted May 22, 2007·4 cites·12 claims
- 1353US5912555AProbe apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Jun 15, 1999·17 cites·17 claims
- 1448US2005253611A1Probe apparatusTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1537US6262570B1Probe apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·6 cites·4 claims
- 1630USD383683SWafer proberTOKYO ELECTRON LTD·Filed 1996·Granted Sep 16, 1997·1 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →