Inventor · disambiguated record
Hidemoto Hayashihara
Also filed as: HAYASHIHARA HIDEMOTO
8 granted patents·2 pending applications·8 citations·filing 2017–2023
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0193US11387152B1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 12, 2022·2 cites·14 claims
- 0284US10937676B2Substrate processing apparatus and device management controllerKOKUSAI ELECTRIC CORP·Filed 2018·Granted Mar 2, 2021·4 cites·11 claims
- 0374US10860005B2Substrate processing apparatus and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2017·Granted Dec 8, 2020·2 cites·11 claims
- 0472US11996337B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Granted May 28, 2024·0 cites·17 claims
- 0562US2022019191A1Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Application pending·0 cites
- 0656US2024014055A1Substrate processing system, substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0752US11237538B2Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2017·Granted Feb 1, 2022·0 cites·21 claims
- 0847US11966210B2Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Apr 23, 2024·0 cites·18 claims
- 0945US11782425B2Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Oct 10, 2023·0 cites·12 claims
- 1036US11086304B2Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysisHITACHI INT ELECTRIC INC·Filed 2017·Granted Aug 10, 2021·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →