Substrate processing apparatus, device management controller, and recording medium

Abstract

A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

What is claimed is: 
     
         1 . A substrate processing apparatus comprising:
 a device management controller comprising:
 at least one selected from the group consisting of:
 a device state monitoring control part configured to monitor device data obtained from an operating state of parts constituting the apparatus; and 
 a parts management control part configured to monitor parts data of the parts constituting the apparatus; and 
 
 a data matching control part configured to monitor facility data provided from a factory facility to the apparatus, 
   wherein the device management controller is configured to store:
 at least one selected from the group consisting of:
 device state monitoring result data acquired by the device state monitoring control part diagnosing a plurality of diagnosis target items comprising the parts by using diagnosis method items; and 
 maintenance timing monitoring result data acquired by the parts management control part diagnosing the diagnosis target items comprising the parts by using diagnosis method items; and 
 
 utility monitoring result data acquired by the data matching control part determining whether or not the facility data is abnormal by comparing the facility data with reference data for the facility data, and 
   wherein the device management controller is configured to update an evaluation information of an operation state of the apparatus based on the at least one selected from the group consisting of the device state monitoring result data and the maintenance timing monitoring result data, and the utility monitoring result data.   
     
     
         2 . The substrate processing apparatus of  claim 1 , wherein the device management controller is configured to update the evaluation information of the operation state of the apparatus based on a result that at least one selected from the group consisting of the device state monitoring result data, the maintenance timing monitoring result data, and the utility monitoring result data is abnormal. 
     
     
         3 . The substrate processing apparatus of  claim 1 , wherein the device management controller is configured to determine an extent of abnormality of the maintenance timing monitoring result data determined as abnormal or the device state monitoring result data determined as abnormal. 
     
     
         4 . The substrate processing apparatus of  claim 2 , wherein the device management controller is configured to update information indicative of an index of the operation state of apparatus in accordance with the number of each of:
 the maintenance timing monitoring result data determined as abnormal; and   the device state monitoring result data determined as abnormal.   
     
     
         5 . The substrate processing apparatus of  claim 4 , wherein the device management controller is configured to perform evaluation by weighting between the maintenance timing monitoring result data determined as abnormal and the device state monitoring result data determined as abnormal. 
     
     
         6 . The substrate processing apparatus of  claim 1 , wherein the device management controller is configured to derive information indicative of an index of the operation state of apparatus by using deduction method. 
     
     
         7 . The substrate processing apparatus of  claim 1 , wherein the device state monitoring control part is configured to determine whether or not the device data is abnormal by comparing the device data with standard data for the device data. 
     
     
         8 . The substrate processing apparatus of  claim 1 , wherein the parts management control part is configured to:
 compare the parts data with a threshold value for the parts data; and   determine replacement timing according to whether or not the parts data exceeds the threshold value.   
     
     
         9 . The substrate processing apparatus of  claim 1 , wherein the device management controller is configured to set the plurality of diagnosis target items comprising the parts of the apparatus as diagnosis target. 
     
     
         10 . The substrate processing apparatus of  claim 1 , wherein the plurality of diagnosis target items are set as a module concerning one or more parts that constitutes at least one selected from the group consisting of a reaction chamber, a transfer chamber, a loader chamber, and a transfer system. 
     
     
         11 . The substrate processing apparatus of  claim 10 , wherein a diagnosis target item that concerns the reaction chamber comprises at least one selected from the group consisting of a reaction chamber temperature, a reaction chamber pressure, a flow rate of a gas supplied into the reaction chamber, an exhaust pressure for exhausting a gas from the reaction chamber, and a flow rate of cooling water supplied to a component constituting the reaction chamber, and
 wherein the gas supplied into the reaction chamber comprises at least one selected from the group consisting of a processing gas and a dilution gas.   
     
     
         12 . The substrate processing apparatus of  claim 1 , wherein the plurality of diagnosis target items are items for diagnosing abnormality of an amount of over-time change of the device data by comparison with at least one selected from the group consisting of an upper limit value and a lower limit value of standard data. 
     
     
         13 . The substrate processing apparatus of  claim 12 , wherein the plurality of diagnosis target items are items for classifying a type of the abnormality by continuously monitoring a characteristic value of the device data and detecting the abnormality from a monitored value of the device data. 
     
     
         14 . The substrate processing apparatus of  claim 12 , wherein the plurality of diagnosis target items are items for diagnosing a cause or a site of the abnormality by statistically processing a result of monitoring when a monitored value of the device data deviates by a predetermined value or more from standard data. 
     
     
         15 . The substrate processing apparatus of  claim 1 , further comprising a display device,
 wherein the device management controller is configured to cause the display device to display an icon in accordance with the number of each of:
 the maintenance timing monitoring result data determined as abnormal for the diagnosis target items; and 
 the device state monitoring result data determined as abnormal for the diagnosis target items. 
   
     
     
         16 . The substrate processing apparatus of  claim 1 , further comprising a display device,
 wherein the device management controller is configured to cause the display device to display an icon that abnormality has occurred according to presence or absence of the utility monitoring result data determined as abnormal.   
     
     
         17 . The substrate processing apparatus of  claim 1 , further comprising a display device,
 wherein the device management controller is configured to cause the display device to display at least one screen selected from the group consisting of:
 a screen for displaying at least one monitoring result data selected from the group consisting of the maintenance timing monitoring result data and the device state monitoring result data; 
 a screen for displaying the utility monitoring result data; and 
 a screen for displaying the information evaluating the operation state of the apparatus. 
   
     
     
         18 . The substrate processing apparatus of  claim 1 , further comprising a display device,
 wherein the device management controller is configured to cause the display device to display presence or absence of setting as a diagnosis target item for each of the maintenance timing monitoring result data and the device state monitoring result data.   
     
     
         19 . A device management controller comprising:
 at least one selected from the group consisting of:
 a device state monitoring control part configured to monitor device data obtained from an operating state of parts constituting an apparatus; and 
 a parts management control part configured to monitor parts data of the parts constituting the apparatus; and 
   a data matching control part configured to monitor facility data provided from a factory facility to the apparatus,   wherein the device management controller is configured to store:
 at least one selected from the group consisting of:
 device state monitoring result data acquired by the device state monitoring control part diagnosing a plurality of diagnosis target items comprising the parts by using diagnosis method items; and 
 maintenance timing monitoring result data acquired by the parts management control part diagnosing the diagnosis target items comprising the parts by using diagnosis method items; and 
 
 utility monitoring result data acquired by the data matching control part determining whether or not the facility data is abnormal by comparing the facility data with reference data for the facility data, and 
   wherein the device management controller is configured to update an evaluation information of an operation state of the apparatus based on the at least one selected from the group consisting of the device state monitoring result data and the maintenance timing monitoring result data, and the utility monitoring result data.   
     
     
         20 . A non-transitory computer-readable recording medium storing a program that causes a device management controller to perform a process, wherein the device management controller comprises:
 at least one selected from the group consisting of:
 a device state monitoring control part configured to monitor device data obtained from an operating state of parts constituting an apparatus; and 
 a parts management control part configured to monitor parts data of the parts constituting the apparatus; and 
   a data matching control part configured to monitor facility data provided from a factory facility to the apparatus,   wherein the device management controller is configured to store:   at least one selected from the group consisting of:
 device state monitoring result data acquired by the device state monitoring control part diagnosing a plurality of diagnosis target items comprising the parts by using diagnosis method items; and 
 maintenance timing monitoring result data acquired by the parts management control part diagnosing the diagnosis target items comprising the parts by using diagnosis method items; and 
   utility monitoring result data acquired by the data matching control part determining whether or not the facility data is abnormal by comparing the facility data with reference data for the facility data, and   wherein the process comprises updating an evaluation information of an operation state of the apparatus based on the at least one selected from the group consisting of the device state monitoring result data and the maintenance timing monitoring result data, and the utility monitoring result data.