Inventor · disambiguated record
Kayoko Yashiki
Also filed as: YASHIKI KAYOKO
13 granted patents·2 pending applications·17 citations·filing 2009–2023
85Inventor score
Top patents by PatentIndex Score
15 records- 0193US11387152B1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 12, 2022·2 cites·14 claims
- 0284US10937676B2Substrate processing apparatus and device management controllerKOKUSAI ELECTRIC CORP·Filed 2018·Granted Mar 2, 2021·4 cites·11 claims
- 0379US9581996B2Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing processASAI KAZUHIDE·Filed 2012·Granted Feb 28, 2017·5 cites·17 claims
- 0474US10860005B2Substrate processing apparatus and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2017·Granted Dec 8, 2020·2 cites·11 claims
- 0572US11996337B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Granted May 28, 2024·0 cites·17 claims
- 0670US10289781B2Management apparatus, substrate processing system and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted May 14, 2019·2 cites·12 claims
- 0762US2022019191A1Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Application pending·0 cites
- 0860US8329479B2Information managing method, information managing apparatus and substrate processing systemASAI KAZUHIDE·Filed 2009·Granted Dec 11, 2012·2 cites·6 claims
- 0956US12417049B2Management apparatus, method of processing data, recording medium, method of manufacturing semiconductor device, and processing systemKOKUSAI ELECTRIC CORP·Filed 2022·Granted Sep 16, 2025·0 cites·19 claims
- 1056US2024014055A1Substrate processing system, substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 1152US11237538B2Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2017·Granted Feb 1, 2022·0 cites·21 claims
- 1252US8719230B2Information managing method, information searching method and data displaying methodHITACHI INT ELECTRIC INC·Filed 2012·Granted May 6, 2014·0 cites·8 claims
- 1347US11966210B2Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Apr 23, 2024·0 cites·18 claims
- 1445US11782425B2Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Oct 10, 2023·0 cites·12 claims
- 1536US11086304B2Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysisHITACHI INT ELECTRIC INC·Filed 2017·Granted Aug 10, 2021·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →