Inventor · disambiguated record
Hiromitsu Kambara
Also filed as: KAMBARA HIROMITSU
5 granted patents·1 pending application·186 citations·filing 2004–2022
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0195US6852584B1Method of trimming a gate electrode structureTOKYO ELECTRON LTD·Filed 2004·Granted Feb 8, 2005·134 cites·34 claims
- 0288US7396431B2Plasma processing system for treating a substrateTOKYO ELECTRON LTD·Filed 2004·Granted Jul 8, 2008·50 cites·60 claims
- 0387US11694872B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Granted Jul 4, 2023·1 cites·22 claims
- 0468US11450506B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Sep 20, 2022·0 cites·22 claims
- 0544US7709397B2Method and system for etching a high-k dielectric materialTOKYO ELECTRON LTD·Filed 2004·Granted May 4, 2010·1 cites·12 claims
- 0638US2005227494A1Processing system and method for treating a substrateTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →