Inventor · disambiguated record
Hiromi Kumagai
Also filed as: KUMAGAI HIROMI
9 granted patents·1 pending application·372 citations·filing 1986–2001
91Inventor score
Top patents by PatentIndex Score
10 records- 0189US5916455AMethod and apparatus for generating a low pressure plasmaAPPLIED MATERIALS INC·Filed 1996·Granted Jun 29, 1999·70 cites·6 claims
- 0289US5660671AMagnetron plasma processing apparatus and processing methodTOKYO ELECTRON LTD·Filed 1994·Granted Aug 26, 1997·49 cites·5 claims
- 0389US5332442ASurface processing apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Jul 26, 1994·139 cites·14 claims
- 0468US5439547ASemiconductor manufacturing apparatus with a spare vacuum chamberTOKYO ELECTRON LTD·Filed 1993·Granted Aug 8, 1995·46 cites·11 claims
- 0565US5376211AMagnetron plasma processing apparatus and processing methodTOKYO ELECTRON LTD·Filed 1991·Granted Dec 27, 1994·14 cites·5 claims
- 0662US4954685AHeating furnace for semiconductor wafersTOKYO ELECTRON LTD·Filed 1988·Granted Sep 4, 1990·14 cites·2 claims
- 0760US4733632AWafer feeding apparatusTOKYO ELECTRON LTD·Filed 1986·Granted Mar 29, 1988·30 cites·8 claims
- 0837US6247889B1Multiple-shaft power transmission apparatus and wafer transport arm linkBKS LAB LTD·Filed 1999·Granted Jun 19, 2001·10 cites·3 claims
- 0931US5888338AMagnetron plasma processing apparatus and processing methodTOKYO ELECTRON LTD·Filed 1997·Granted Mar 30, 1999·0 cites·6 claims
- 1031US2001012483A1Multiple-shaft power transmission apparatus and wafer transport arm linkBKS LAB LTD·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →