Inventor · disambiguated record
Hidetoshi Nishiyama
Also filed as: NISHIYAMA HIDETOSHI
113 granted patents·18 pending applications·1,772 citations·filing 1993–2020
99Inventor score
Top patents by PatentIndex Score
131 records- 0197US7333192B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 19, 2008·37 cites·20 claims
- 0297US7248352B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2003·Granted Jul 24, 2007·66 cites·4 claims
- 0397US7211797B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2005·Granted May 1, 2007·28 cites·15 claims
- 0497US7098055B2Apparatus and method for testing defectsHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 29, 2006·36 cites·7 claims
- 0596US7940383B2Method of detecting defects on an objectHITACHI LTD·Filed 2009·Granted May 10, 2011·42 cites·20 claims
- 0696US7639350B2Apparatus and method for testing defectsHITACHI LTD·Filed 2007·Granted Dec 29, 2009·25 cites·20 claims
- 0796US6411377B1Optical apparatus for defect and particle size inspectionHITACHI LTD·Filed 1999·Granted Jun 25, 2002·174 cites·29 claims
- 0895US7449690B2Inspection method and inspection apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 11, 2008·28 cites·20 claims
- 0995US7400393B2Method and apparatus for detecting defects in a specimen utilizing information concerning the specimenHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 15, 2008·28 cites·7 claims
- 1095US6797975B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI LTD·Filed 2001·Granted Sep 28, 2004·56 cites·6 claims
- 1194US9778206B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 3, 2017·16 cites·8 claims
- 1294US7061602B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI HIGH TECH CORP·Filed 2005·Granted Jun 13, 2006·18 cites·13 claims
- 1393US7443496B2Apparatus and method for testing defectsHITACHI LTD·Filed 2007·Granted Oct 28, 2008·16 cites·15 claims
- 1493US7315366B2Apparatus and method for inspecting defectsHITACHI LTD·Filed 2007·Granted Jan 1, 2008·17 cites·5 claims
- 1593US5463459AMethod and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processHITACHI LTD·Filed 1993·Granted Oct 31, 1995·145 cites·39 claims
- 1692US8013989B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2010·Granted Sep 6, 2011·7 cites·16 claims
- 1792US7462828B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 9, 2008·18 cites·30 claims
- 1892US7037735B2Apparatus and method for testing defectsHITACHI HIGH TECH CORP·Filed 2002·Granted May 2, 2006·43 cites·18 claims
- 1991US7923700B2Sample inspection apparatus, sample inspection method and sample inspection systemJEOL LTD·Filed 2007·Granted Apr 12, 2011·13 cites·25 claims
- 2091US7768635B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·10 cites·20 claims
- 2191US7745802B2Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holderJEOL LTD·Filed 2008·Granted Jun 29, 2010·16 cites·25 claims
- 2291US7692779B2Apparatus and method for testing defectsHITACHI LTD·Filed 2005·Granted Apr 6, 2010·12 cites·20 claims
- 2391US7521679B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 21, 2009·10 cites·12 claims
- 2491US7417723B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2006·Granted Aug 26, 2008·10 cites·12 claims
- 2591US7359044B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 15, 2008·17 cites·23 claims
- 2691US7262425B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 28, 2007·13 cites·18 claims
- 2791US7177020B2Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processRENESAS TECH CORP·Filed 2005·Granted Feb 13, 2007·15 cites·19 claims
- 2891US6936835B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI LTD·Filed 2002·Granted Aug 30, 2005·34 cites·22 claims
- 2991US6583414B2Method of inspecting pattern and inspecting instrumentHITACHI LTD·Filed 2000·Granted Jun 24, 2003·52 cites·17 claims
- 3090US8218138B2Apparatus and method for inspecting defectsNAKANO HIROYUKI·Filed 2011·Granted Jul 10, 2012·7 cites·11 claims
- 3190US7848563B2Method and apparatus for inspecting a defect of a patternHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 7, 2010·18 cites·14 claims
- 3290US6888959B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted May 3, 2005·38 cites·20 claims
- 3390US6731384B2Apparatus for detecting foreign particle and defect and the same methodHITACHI LTD·Filed 2001·Granted May 4, 2004·44 cites·18 claims
- 3489US8153969B2Inspection method and inspection system using charged particle beamFUKADA ATSUKO·Filed 2008·Granted Apr 10, 2012·16 cites·7 claims
- 3589US8045146B2Method and apparatus for reviewing defectHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 25, 2011·18 cites·9 claims
- 3688US7745785B2Sample inspection method, sample inspection apparatus, and sample holderJEOL LTD·Filed 2007·Granted Jun 29, 2010·12 cites·18 claims
- 3788US7019294B2Inspection method and apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2004·Granted Mar 28, 2006·32 cites·15 claims
- 3888US6597448B1Apparatus and method of inspecting foreign particle or defect on a sampleHITACHI LTD·Filed 2000·Granted Jul 22, 2003·44 cites·20 claims
- 3988US6586952B2Method of inspecting pattern and inspecting instrumentFiled 2001·Granted Jul 1, 2003·28 cites·8 claims
- 4087US8811712B2Defect inspection method and device thereofMAEDA SHUNJI·Filed 2009·Granted Aug 19, 2014·12 cites·12 claims
- 4187US7620232B2Method and apparatus for pattern inspectionHITACHI HIGH TECH CORP·Filed 2005·Granted Nov 17, 2009·13 cites·14 claims
- 4287US7417721B2Defect detector and defect detecting methodHITACHI LTD·Filed 2003·Granted Aug 26, 2008·20 cites·21 claims
- 4387US7187438B2Apparatus and method for inspecting defectsHITACHI LTD·Filed 2002·Granted Mar 6, 2007·25 cites·24 claims
- 4486US8274651B2Method of inspecting a semiconductor device and an apparatus thereofHAMAMATSU AKIRA·Filed 2011·Granted Sep 25, 2012·3 cites·14 claims
- 4586US7928380B2Sample holder, method for observation and inspection, and apparatus for observation and inspectionJEOL LTD·Filed 2008·Granted Apr 19, 2011·9 cites·25 claims
- 4686US7526747B2Inspection method and inspection system using charged particle beamHITACHI LTD·Filed 2005·Granted Apr 28, 2009·7 cites·9 claims
- 4786US7115892B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 3, 2006·7 cites·5 claims
- 4885US8558173B2Method of inspecting pattern and inspecting instrumentNOZOE MARI·Filed 2006·Granted Oct 15, 2013·7 cites·6 claims
- 4985US7643138B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2008·Granted Jan 5, 2010·5 cites·12 claims
- 5085US7601954B2Method and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 13, 2009·10 cites·16 claims
Showing the top 50 of 131 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →