Inventor · disambiguated record
Hirosi Sobukawa
Also filed as: SOBUKAWA HIROSI
45 granted patents·9 pending applications·1,601 citations·filing 1998–2015
99Inventor score
Top patents by PatentIndex Score
54 records- 0199US7420164B2Objective lens, electron beam system and method of inspecting defectEBARA CORP·Filed 2005·Granted Sep 2, 2008·68 cites·1 claims
- 0299US7109483B2Method for inspecting substrate, substrate inspecting system and electron beam apparatusEBARA CORP·Filed 2001·Granted Sep 19, 2006·159 cites·9 claims
- 0398US9368314B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2014·Granted Jun 14, 2016·38 cites·10 claims
- 0498US7601972B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2007·Granted Oct 13, 2009·49 cites·8 claims
- 0598US7138629B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2004·Granted Nov 21, 2006·151 cites·22 claims
- 0698US6992290B2Electron beam inspection system and inspection method and method of manufacturing devices using the systemTOSHIBA KK·Filed 2001·Granted Jan 31, 2006·97 cites·5 claims
- 0798US6593152B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2001·Granted Jul 15, 2003·109 cites·60 claims
- 0897US7741601B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2008·Granted Jun 22, 2010·36 cites·13 claims
- 0997US7365324B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2006·Granted Apr 29, 2008·49 cites·7 claims
- 1097US7351969B2Electron beam inspection system and inspection method and method of manufacturing devices using the systemEBARA CORP·Filed 2005·Granted Apr 1, 2008·37 cites·5 claims
- 1197US7297949B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2006·Granted Nov 20, 2007·28 cites·6 claims
- 1297US7244932B2Electron beam apparatus and device fabrication method using the electron beam apparatusEBARA CORP·Filed 2001·Granted Jul 17, 2007·74 cites·51 claims
- 1397US7223973B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2005·Granted May 29, 2007·38 cites·10 claims
- 1497US7135676B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2001·Granted Nov 14, 2006·61 cites·12 claims
- 1597US6855929B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2001·Granted Feb 15, 2005·106 cites·55 claims
- 1696US7569838B2Electron beam inspection system and inspection method and method of manufacturing devices using the systemEBARA CORP·Filed 2008·Granted Aug 4, 2009·23 cites·5 claims
- 1796US7439502B2Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2007·Granted Oct 21, 2008·23 cites·7 claims
- 1896US7417236B2Sheet beam-type testing apparatusEBARA CORP·Filed 2006·Granted Aug 26, 2008·20 cites·18 claims
- 1996US7385197B2Electron beam apparatus and a device manufacturing method using the same apparatusEBARA CORP·Filed 2005·Granted Jun 10, 2008·30 cites·5 claims
- 2096US7049585B2Sheet beam-type testing apparatusEBARA CORP·Filed 2001·Granted May 23, 2006·55 cites·7 claims
- 2195US8822919B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerKIMBA TOSHIFUMI·Filed 2011·Granted Sep 2, 2014·15 cites·10 claims
- 2294US8946631B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2014·Granted Feb 3, 2015·11 cites·14 claims
- 2394US7241993B2Inspection system by charged particle beam and method of manufacturing devices using the systemTOSHIBA KK·Filed 2001·Granted Jul 10, 2007·54 cites·12 claims
- 2494US7095022B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusNIKON CORP·Filed 2001·Granted Aug 22, 2006·48 cites·13 claims
- 2593US7928378B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2008·Granted Apr 19, 2011·17 cites·11 claims
- 2693US7408175B2Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using formerEBARA CORP·Filed 2007·Granted Aug 5, 2008·19 cites·9 claims
- 2792US7829871B2Sheet beam-type testing apparatusEBARA CORP·Filed 2008·Granted Nov 9, 2010·10 cites·7 claims
- 2891US8053726B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2008·Granted Nov 8, 2011·11 cites·11 claims
- 2991US7129485B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2004·Granted Oct 31, 2006·30 cites·8 claims
- 3090US8803103B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2013·Granted Aug 12, 2014·6 cites·7 claims
- 3190US7247848B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2003·Granted Jul 24, 2007·28 cites·16 claims
- 3290US7109484B2Sheet beam-type inspection apparatusEBARA CORP·Filed 2004·Granted Sep 19, 2006·23 cites·6 claims
- 3388US7888642B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2008·Granted Feb 15, 2011·9 cites·9 claims
- 3487US7423267B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2006·Granted Sep 9, 2008·8 cites·5 claims
- 3586US9406480B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusEBARA CORP·Filed 2015·Granted Aug 2, 2016·3 cites·14 claims
- 3683US8742341B2Testing apparatus using charged particles and device manufacturing method using the testing apparatusNOJI NOBUHARU·Filed 2010·Granted Jun 3, 2014·4 cites·13 claims
- 3783US8368031B2Inspection system by charged particle beam and method of manufacturing devices using the systemEBARA CORP·Filed 2011·Granted Feb 5, 2013·3 cites·7 claims
- 3882US7863580B2Electron beam apparatus and an aberration correction optical apparatusEBARA CORP·Filed 2007·Granted Jan 4, 2011·7 cites·8 claims
- 3978US8859984B2Method and apparatus for inspecting sample surfaceNOJI NOBUHARU·Filed 2013·Granted Oct 14, 2014·2 cites·12 claims
- 4078US8525127B2Method and apparatus for inspecting sample surfaceNOJI NOBUHARU·Filed 2012·Granted Sep 3, 2013·3 cites·10 claims
- 4178US7745784B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2007·Granted Jun 29, 2010·4 cites·8 claims
- 4275US9390886B2Electro-optical inspection apparatus using electron beamNAKASUJI MAMORU·Filed 2006·Granted Jul 12, 2016·5 cites·11 claims
- 4375US7025005B2Stage device and angle detecting deviceEBARA CORP·Filed 2003·Granted Apr 11, 2006·17 cites·20 claims
- 4473US7952071B2Apparatus and method for inspecting sample surfaceEBARA CORP·Filed 2007·Granted May 31, 2011·3 cites·4 claims
- 4561US2008121804A1Method for inspecting substrate, substrate inspecting system and electronEBARA CORP·Filed 2007·Application pending·0 cites
- 4660US2008315090A1Objective lens, electron beam system and method of inspecting defectEBARA CORP·Filed 2008·Application pending·0 cites
- 4760US2008173815A1Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2008·Application pending·0 cites
- 4859US2014367570A1Substrate inspection method and a substrate processing methodEBARA CORP·Filed 2014·Application pending·0 cites
- 4958US2009050802A1Method and apparatus for inspecting sample surfaceEBARA CORP·Filed 2007·Application pending·0 cites
- 5056US2007045536A1Method for inspecting substrate, substrate inspecting system and electron beam apparatusEBARA CORP·Filed 2006·Application pending·0 cites
Showing the top 50 of 54 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →