Inventor · disambiguated record
Hiroshi Someya
Also filed as: SOMEYA HIROSHI
22 granted patents·8 pending applications·105 citations·filing 2005–2021
94Inventor score
Top patents by PatentIndex Score
30 records- 0191US7880153B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2008·Granted Feb 1, 2011·14 cites·15 claims
- 0288US7923705B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Apr 12, 2011·25 cites·30 claims
- 0385US8536550B2Method and apparatus for cleaning collector mirror in EUV light generatorASAYAMA TAKESHI·Filed 2009·Granted Sep 17, 2013·7 cites·15 claims
- 0481US9253866B2Gas lock device and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2014·Granted Feb 2, 2016·7 cites·20 claims
- 0581US8003962B2Extreme ultraviolet light source apparatus and nozzle protection deviceGIGAPHOTON INC·Filed 2009·Granted Aug 23, 2011·13 cites·22 claims
- 0675US8173984B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2009·Granted May 8, 2012·8 cites·27 claims
- 0774US8212228B2Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2009·Granted Jul 3, 2012·9 cites·16 claims
- 0873US8445877B2Extreme ultraviolet light source apparatus and target supply deviceSOMEYA HIROSHI·Filed 2011·Granted May 21, 2013·3 cites·22 claims
- 0972US8294129B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2011·Granted Oct 23, 2012·3 cites·7 claims
- 1069US10485085B2Extreme ultraviolet light sensor unit and extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2018·Granted Nov 19, 2019·1 cites·20 claims
- 1168US9046651B2Mirror deviceSOMEYA HIROSHI·Filed 2011·Granted Jun 2, 2015·2 cites·17 claims
- 1265US9229192B2Mirror deviceGIGAPHOTON INC·Filed 2015·Granted Jan 5, 2016·1 cites·16 claims
- 1363US8450706B2Extreme ultraviolet light source apparatusABE TAMOTSU·Filed 2009·Granted May 28, 2013·6 cites·16 claims
- 1462US8779402B2Target supply deviceGIGAPHOTON INC·Filed 2012·Granted Jul 15, 2014·1 cites·10 claims
- 1562US2014166046A1Method and apparatus for cleaning collector mirror in euv light generatorGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 1657US7683355B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2007·Granted Mar 23, 2010·4 cites·9 claims
- 1751US11320740B2Target supply device, target supply method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted May 3, 2022·0 cites·19 claims
- 1851US8804902B2Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Aug 12, 2014·0 cites·10 claims
- 1951US2012119118A1Extreme ultraviolet light source systemWATANABE YUKIO·Filed 2012·Application pending·0 cites
- 2049US10481354B2Structure of connection between optical unit and optical path tubeGIGAPHOTON INC·Filed 2018·Granted Nov 19, 2019·0 cites·20 claims
- 2148US11428892B2Optical apparatusGIGAPHOTON INC·Filed 2020·Granted Aug 30, 2022·0 cites·2 claims
- 2247US2010172222A1Information reproducing apparatus, servo adjusting method, and the likePIONEER CORP·Filed 2007·Application pending·0 cites
- 2347US2010193711A1Extreme ultraviolet light source systemWATANABE YUKIO·Filed 2010·Application pending·0 cites
- 2446US2009310466A1Objective lens driving device and driving method for the samePIONEER CORP·Filed 2006·Application pending·0 cites
- 2546US2010220569A1Final area retrieving apparatus, information reproducing apparatus, final area retrieving method, and final area retrieving programPIONEER CORP·Filed 2006·Application pending·0 cites
- 2645US9233782B2Target supply deviceGIGAPHOTON INC·Filed 2012·Granted Jan 12, 2016·0 cites·6 claims
- 2745US2012228527A1Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2012·Application pending·0 cites
- 2844US8258492B2Differential evacuation systemSOMEYA HIROSHI·Filed 2009·Granted Sep 4, 2012·1 cites·15 claims
- 2942US2008117784A1Boundary Detection Apparatus, Boundary Detection Method, Boundary Detection Program, and Information Recording MediumNISHIO YOSHIMICHI·Filed 2005·Application pending·0 cites
- 3040US8477412B2Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatusSOMEYA HIROSHI·Filed 2007·Granted Jul 2, 2013·0 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →