Inventor · disambiguated record
Hirofumi Takeguchi
Also filed as: TAKEGUCHI HIROFUMI
28 granted patents·4 pending applications·140 citations·filing 2002–2023
95Inventor score
Top patents by PatentIndex Score
32 records- 0193US9256131B2Developing method for developing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Feb 9, 2016·7 cites·6 claims
- 0288US7901514B2Substrate cleaning method and developing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Mar 8, 2011·12 cites·20 claims
- 0387US8026048B2Developing apparatus and developing methodTOKYO ELECTRON LTD·Filed 2010·Granted Sep 27, 2011·7 cites·13 claims
- 0486US7604013B2Substrate cleaning method and developing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Oct 20, 2009·11 cites·10 claims
- 0585US6811962B2Method for developing processing and apparatus for supplying developing solutionTOKYO ELECTRON LTD·Filed 2002·Granted Nov 2, 2004·29 cites·10 claims
- 0682US8956694B2Developing apparatus, developing method and storage mediumTAKEGUCHI HIROFUMI·Filed 2010·Granted Feb 17, 2015·4 cites·7 claims
- 0782US6709174B2Apparatus and method for developmentTOKYO ELECTRON LTD·Filed 2002·Granted Mar 23, 2004·27 cites·14 claims
- 0881US8865396B2Developing method and developing apparatusTAKEGUCHI HIROFUMI·Filed 2009·Granted Oct 21, 2014·5 cites·13 claims
- 0979US9731226B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2013·Granted Aug 15, 2017·3 cites·9 claims
- 1075US9690202B2Developing method, developing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Jun 27, 2017·2 cites·16 claims
- 1174US10022652B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 17, 2018·1 cites·1 claims
- 1274US7665918B2Developing apparatus, developing method and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Feb 23, 2010·4 cites·19 claims
- 1373US9878267B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2017·Granted Jan 30, 2018·1 cites·4 claims
- 1472US7841787B2Rinsing method, developing method, developing system and computer-read storage mediumTOKYO ELECTRON LTD·Filed 2006·Granted Nov 30, 2010·3 cites·16 claims
- 1571US7806076B2Developing apparatus and methodTOKYO ELECTRON LTD·Filed 2005·Granted Oct 5, 2010·3 cites·7 claims
- 1666US7918182B2Developing device and developing methodTOKYO ELECTRON LTD·Filed 2004·Granted Apr 5, 2011·7 cites·13 claims
- 1765US8147153B2Rinsing method, developing method, developing system and computer-read storage mediumTAKEGUCHI HIROFUMI·Filed 2010·Granted Apr 3, 2012·1 cites·18 claims
- 1864US9952512B2Developing method, developing apparatus, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Apr 24, 2018·1 cites·7 claims
- 1961US7896562B2Developing method, developing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Mar 1, 2011·1 cites·24 claims
- 2061US7823534B2Development device and development methodTOKYO ELECTRON LTD·Filed 2004·Granted Nov 2, 2010·6 cites·14 claims
- 2158US2024047234A1Substrate processing apparatus, supply system, substrate processing method, and supply methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2256US10901320B2Developing method, developing apparatus, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Jan 26, 2021·0 cites·5 claims
- 2355US6991385B2Method for developing processing and apparatus for supplying developing solutionTOKYO ELECTRON LTD·Filed 2004·Granted Jan 31, 2006·4 cites·2 claims
- 2452US8440266B2Developing device, developing method and storage mediumSATO NORIKATSU·Filed 2010·Granted May 14, 2013·1 cites·4 claims
- 2551US8445189B2Developing device and developing methodYAMAMOTO TARO·Filed 2011·Granted May 21, 2013·0 cites·12 claims
- 2648US10120286B2Developing method, developing apparatus, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2015·Granted Nov 6, 2018·0 cites·12 claims
- 2747US2022399208A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 2846US11769661B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Sep 26, 2023·0 cites·5 claims
- 2946US2010323307A1Developing apparatus and methodTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 3045US8029624B2Rinse method and developing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Oct 4, 2011·0 cites·10 claims
- 3143US8469614B2Substrate treatment method, computer storage medium and substrate treatment apparatusTAKEGUCHI HIROFUMI·Filed 2011·Granted Jun 25, 2013·0 cites·13 claims
- 3239US2018185856A1Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →