Inventor · disambiguated record
Hideki Wakai
Also filed as: WAKAI HIDEKI
4 granted patents·1 pending application·25 citations·filing 2003–2018
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0182US10553463B2Temperature control system, semiconductor manufacturing device, and temperature control methodTOKYO ELECTRON LTD·Filed 2018·Granted Feb 4, 2020·4 cites·12 claims
- 0282US9984908B2Temperature control system, semiconductor manufacturing device, and temperature control methodTOKYO ELECTRON LTD·Filed 2012·Granted May 29, 2018·7 cites·12 claims
- 0368US6780795B2Heat treatment apparatus for preventing an initial temperature drop when consecutively processing a plurality of objectsTOKYO ELECTRON LTD·Filed 2003·Granted Aug 24, 2004·14 cites·13 claims
- 0436US2011220288A1Temperature control system, temperature control method, plasma processing apparatus and computer storage mediumTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 0532US10903057B2Temperature adjustment device and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jan 26, 2021·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →