Inventor · disambiguated record
Hiromasa Yamanashi
Also filed as: YAMANASHI HIROMASA
7 granted patents·28 citations·filing 2007–2011
79Inventor score
Top patents by PatentIndex Score
7 records- 0188US7655907B2Charged particle beam apparatus and pattern measuring methodHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 2, 2010·12 cites·12 claims
- 0284US8766183B2Charged particle beam deviceFUKUDA MUNEYUKI·Filed 2009·Granted Jul 1, 2014·8 cites·17 claims
- 0378US8704175B2Scanning electron microscopeSOHDA YASUNARI·Filed 2011·Granted Apr 22, 2014·4 cites·14 claims
- 0472US7679056B2Metrology system of fine pattern for process control by charged particle beamHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 16, 2010·4 cites·4 claims
- 0551US8026482B2Charged particle beam apparatus and control method thereforHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 27, 2011·0 cites·17 claims
- 0642US8816277B2Pattern evaluation method, device therefor, and electron beam deviceSOHDA YASUNARI·Filed 2010·Granted Aug 26, 2014·0 cites·22 claims
- 0732US9129775B2Specimen potential measuring method, and charged particle beam deviceISHIJIMA TATSUAKI·Filed 2010·Granted Sep 8, 2015·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →