Inventor · disambiguated record
Hui Chen
Also filed as: CHEN HUI · CHEN HUI FRED
27 granted patents·22 pending applications·129 citations·filing 2000–2025
95Inventor score
Top patents by PatentIndex Score
49 records- 0197US11446711B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2020·Granted Sep 20, 2022·8 cites·11 claims
- 0296US11577358B2Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2020·Granted Feb 14, 2023·4 cites·21 claims
- 0395US11633833B2Use of steam for pre-heating of CMP componentsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 25, 2023·3 cites·20 claims
- 0485US12459011B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2024·Granted Nov 4, 2025·0 cites·14 claims
- 0584US2024157504A1Apparatus and method for cmp temperature controlAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0683US12296427B2Apparatus and method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted May 13, 2025·1 cites·12 claims
- 0782US8844546B2Apparatus and method for cleaning semiconductor substrate using pressurized fluidCHEN HUI FRED·Filed 2008·Granted Sep 30, 2014·11 cites·21 claims
- 0882US6905968B2Process for selectively etching dielectric layersAPPLIED MATERIALS INC·Filed 2001·Granted Jun 14, 2005·27 cites·24 claims
- 0982US6569775B1Method for enhancing plasma processing performanceAPPLIED MATERIALS INC·Filed 2000·Granted May 27, 2003·28 cites·28 claims
- 1082US2025326086A1In-situ conditioner disk cleaning during cmpAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1181US12459078B2In-situ conditioner disk cleaning during CMPAPPLIED MATERIALS INC·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 1281US8968055B2Methods and apparatus for pre-chemical mechanical planarization buffing moduleCHEN HUI·Filed 2012·Granted Mar 3, 2015·5 cites·16 claims
- 1381US7774887B2Scrubber box and methods for using the sameAPPLIED MATERIALS INC·Filed 2008·Granted Aug 17, 2010·6 cites·10 claims
- 1480US7377002B2Scrubber boxAPPLIED MATERIALS INC·Filed 2004·Granted May 27, 2008·20 cites·5 claims
- 1579US12434347B2Method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2023·Granted Oct 7, 2025·0 cites·13 claims
- 1678US12030093B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2022·Granted Jul 9, 2024·0 cites·15 claims
- 1777US11919123B2Apparatus and method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2021·Granted Mar 5, 2024·0 cites·19 claims
- 1876US2025205847A1Method for cmp temperature controlAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1975US2023256562A1Use of steam for pre-heating of cmp componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2074US10229842B2Double sided buff module for post CMP cleaningAPPLIED MATERIALS INC·Filed 2013·Granted Mar 12, 2019·3 cites·18 claims
- 2172US7636996B2Seal installation toolAPPLIED MATERIALS INC·Filed 2008·Granted Dec 29, 2009·4 cites·18 claims
- 2271US11697187B2Temperature-based assymetry correction during CMP and nozzle for media dispensingAPPLIED MATERIALS INC·Filed 2020·Granted Jul 11, 2023·0 cites·14 claims
- 2371US7962990B2Brush box cleaner module with force controlAPPLIED MATERIALS INC·Filed 2008·Granted Jun 21, 2011·3 cites·20 claims
- 2469US2023249225A1Steam cleaning of cmp componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2568US2024408650A1Method and apparatus to clean substrate with atomizing nozzleAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2666US2024042570A1Cleaning of cmp temperature control systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2765US8181302B2Brush alignment control mechanismCHEN HUNG CHIH·Filed 2009·Granted May 22, 2012·2 cites·17 claims
- 2864US11628478B2Steam cleaning of CMP componentsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 18, 2023·0 cites·10 claims
- 2963US9119461B2High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methodsCHEN HUI·Filed 2012·Granted Sep 1, 2015·1 cites·12 claims
- 3062US12243761B2Detection and analysis of substrate support and pre-heat ring in a process chamber via imagingAPPLIED MATERIALS INC·Filed 2022·Granted Mar 4, 2025·0 cites·19 claims
- 3162US2025073850A1Gas amplifier for cmp coolingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3260US11865671B2Temperature-based in-situ edge assymetry correction during CMPAPPLIED MATERIALS INC·Filed 2020·Granted Jan 9, 2024·0 cites·20 claims
- 3359US2024066664A1Pad surface cleaning device around pad conditioner to enable insitu pad conditioningAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3459US2025319570A1Contact cleaning units in cmp polisherAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3556US2009025757A1Lid for a semiconductor device processing apparatus and methods for using the sameAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 3656US2009032071A1Lid for a semiconductor device processing apparatus and methods for using the sameAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 3751US8101934B2Methods and apparatus for detecting a substrate notch or flatCHEN HUI·Filed 2007·Granted Jan 24, 2012·3 cites·23 claims
- 3851US2024274463A1Overlapping substrate supports and pre-heat rings, and related process kits, processing chambers, methods, and componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3951US2008164396A1Clamping MechanismAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 4050US2014150815A1Disc-brush holder apparatus, disc-brush assembly, and substrate processing methodsAPPLIED MATERIALS INC·Filed 2012·Application pending·0 cites
- 4146US2013283553A1Anti-slip scrubber brush and assembly methodsCHEN HUI·Filed 2012·Application pending·0 cites
- 4245US10256120B2Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaningAPPLIED MATERIALS INC·Filed 2014·Granted Apr 9, 2019·0 cites·13 claims
- 4342US2003190870A1Cleaning ceramic surfacesAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 4442US2009196724A1Edge contact gripperCHEN HUI FRED·Filed 2008·Application pending·0 cites
- 4540US9873179B2Carrier for small pad for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2016·Granted Jan 23, 2018·0 cites·21 claims
- 4640US2014310895A1Scrubber brush force control assemblies, apparatus and methods for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 4738US2005079703A1Method for planarizing an interconnect structureAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 4837US2004200498A1Method and apparatus for cleaning a substrate processing chamberAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 4937US2005009342A1Method for etching an organic anti-reflective coating (OARC)APPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →