Inventor · disambiguated record
Hubertus Antonius Geraets
Also filed as: GERAETS HUBERTUS ANTONIUS
5 granted patents·21 citations·filing 2008–2015
76Inventor score
Top patents by PatentIndex Score
5 records- 0190US9983489B2Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiationASML NETHERLANDS BV·Filed 2015·Granted May 29, 2018·5 cites·21 claims
- 0282US8908148B2Calibration method and inspection apparatusGERAETS HUBERTUS ANTONIUS·Filed 2011·Granted Dec 9, 2014·9 cites·10 claims
- 0377US8436998B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2012·Granted May 7, 2013·3 cites·9 claims
- 0468US9519224B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2012·Granted Dec 13, 2016·2 cites·19 claims
- 0564US8289516B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2008·Granted Oct 16, 2012·2 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →