Inventor · disambiguated record
Hyunjong Shim
Also filed as: SHIM HYUNJONG
2 granted patents·4 pending applications·67 citations·filing 2004–2023
66Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0196US9543148B1Mask shrink layer for high aspect ratio dielectric etchLAM RES CORP·Filed 2015·Granted Jan 10, 2017·56 cites·19 claims
- 0292US10431458B2Mask shrink layer for high aspect ratio dielectric etchLAM RES CORP·Filed 2016·Granted Oct 1, 2019·11 cites·17 claims
- 0348US2008023144A1Dielectric etch tool configured for high density and low bombardment energy plasma providing high etch ratesDELGADINO GERARDO A·Filed 2007·Application pending·0 cites
- 0446US2023407177A1Etching gas composition, substrate processing apparatus, and pattern forming method using the etching gas compositionSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0545US2023313039A1Etching gas composition, substrate processing apparatus, and pattern forming method using the sameSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0642US2006118519A1Dielectric etch method with high source and low bombardment plasma providing high etch ratesAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →