Inventor · disambiguated record
Ian Smith
Also filed as: SMITH IAN · SMITH IAN R · SMITH IAN ROBERT
18 granted patents·2 pending applications·818 citations·filing 1997–2009
97Inventor score
Top patents by PatentIndex Score
20 records- 0197US7433040B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Oct 7, 2008·28 cites·18 claims
- 0297US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 0397US7242477B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Jul 10, 2007·124 cites·20 claims
- 0496US7564557B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Jul 21, 2009·19 cites·7 claims
- 0596US7298481B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 20, 2007·46 cites·11 claims
- 0696US7289213B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Oct 30, 2007·49 cites·15 claims
- 0796US7280212B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Oct 9, 2007·45 cites·12 claims
- 0896US6710876B1Metrology system using optical phaseKLA TENCOR TECH CORP·Filed 2000·Granted Mar 23, 2004·100 cites·52 claims
- 0995US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 1095US7876440B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Jan 25, 2011·13 cites·18 claims
- 1195US7663753B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Feb 16, 2010·19 cites·45 claims
- 1294US7385699B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Jun 10, 2008·34 cites·33 claims
- 1394US7301634B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 27, 2007·35 cites·33 claims
- 1494US6999614B1Power assisted automatic supervised classifier creation tool for semiconductor defectsKLA TENCOR CORP·Filed 2000·Granted Feb 14, 2006·126 cites·46 claims
- 1590US7659126B1Electrical test method and apparatusKLA TENCOR TECH CORP·Filed 2007·Granted Feb 9, 2010·15 cites·21 claims
- 1688US7379183B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted May 27, 2008·18 cites·44 claims
- 1786US7361941B1Calibration standards and methodsKLA TENCOR TECH CORP·Filed 2004·Granted Apr 22, 2008·24 cites·29 claims
- 1844US2005094153A1Metrology system using optical phaseFiled 2004·Application pending·0 cites
- 1943US2004207849A1Metrology system using optical phaseKLA TENCOR CORP·Filed 2004·Application pending·0 cites
- 2042US5974351AMultiplexed electronic control systemsJAGUAR CARS·Filed 1997·Granted Oct 26, 1999·25 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Ian Smith files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →