Inventor · disambiguated record
Igor Matheus Petronella Aarts
Also filed as: AARTS IGOR MATHEUS PETRONELLA
16 granted patents·3 pending applications·20 citations·filing 2009–2022
88Inventor score
Files withASML HOLDING NV11ASML NETHERLANDS BV5AARTS IGOR MATHEUS PETRONELLA1SLOTBOOM DAAN MAURTIS1VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS1
Top patents by PatentIndex Score
19 records- 0191US12032299B2Metrology method and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2020·Granted Jul 9, 2024·2 cites·25 claims
- 0288US11971665B2Wafer alignment using form birefringence of targets or productASML HOLDING NV·Filed 2020·Granted Apr 30, 2024·2 cites·16 claims
- 0387US11175593B2Alignment sensor apparatus for process sensitivity compensationASML NETHERLANDS BV·Filed 2019·Granted Nov 16, 2021·4 cites·38 claims
- 0487US10802208B2Broad spectrum radiation by supercontinuum generation using a tapered optical fiberASML HOLDING NV·Filed 2017·Granted Oct 13, 2020·3 cites·18 claims
- 0579US10488767B2Alignment system wafer stack beam analyzerASML HOLDING NV·Filed 2017·Granted Nov 26, 2019·2 cites·20 claims
- 0673US8264671B2Lithographic apparatus and device manufacturing methodAARTS IGOR MATHEUS PETRONELLA·Filed 2009·Granted Sep 11, 2012·5 cites·14 claims
- 0761US12474647B2Generating an alignment signal based on local alignment mark distortionsASML HOLDING NV·Filed 2021·Granted Nov 18, 2025·0 cites·20 claims
- 0861US8477289B2Position measurement using natural frequency vibration of a patternSLOTBOOM DAAN MAURTIS·Filed 2009·Granted Jul 2, 2013·2 cites·8 claims
- 0960US11899380B2Apparatus for and method of sensing alignment marksASML HOLDING NV·Filed 2020·Granted Feb 13, 2024·0 cites·18 claims
- 1058US2024263941A1Intensity imbalance calibration on an overfilled bidirectional markASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1156US12461457B2Asymmetry extended grid model for wafer alignmentASML NETHERLANDS BV·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 1256US2025060680A1Generating an alignment signal without dedicated alignment structuresASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1354US10481507B2Measurement method comprising in-situ printing of apparatus mark and corresponding apparatusASML HOLDING NV·Filed 2017·Granted Nov 19, 2019·0 cites·20 claims
- 1450US11493852B2Noise correction for alignment signalASML HOLDING NV·Filed 2019·Granted Nov 8, 2022·0 cites·14 claims
- 1547US11513446B2Adaptive alignmentASML HOLDING NV·Filed 2019·Granted Nov 29, 2022·0 cites·21 claims
- 1645US11156928B2Alignment mark for two-dimensional alignment in an alignment systemASML HOLDING NV·Filed 2018·Granted Oct 26, 2021·0 cites·21 claims
- 1743US8400617B2Lithographic apparatus having a substrate support with open cell plastic foam partsVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2010·Granted Mar 19, 2013·0 cites·17 claims
- 1837US2015212425A1Quantitative Reticle Distortion Measurement SystemASML HOLDING NV·Filed 2013·Application pending·0 cites
- 1931US10928738B2Adaptive filter for in-line correctionASML HOLDING NV·Filed 2017·Granted Feb 23, 2021·0 cites·30 claims
Join the waitlist — get patent alerts
Get an alert when Igor Matheus Petronella Aarts files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →