Inventor · disambiguated record
Ilya Grodnensky
Also filed as: GRODNENSKY ILYA
15 granted patents·2 pending applications·419 citations·filing 1997–2014
93Inventor score
Top patents by PatentIndex Score
17 records- 0198US7933026B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2009·Granted Apr 26, 2011·178 cites·7 claims
- 0295US6750952B2Apparatus for preforming measurement of a dimension of a test mark for semiconductor processingNIKON PREC INC·Filed 2002·Granted Jun 15, 2004·63 cites·32 claims
- 0392US7567351B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2007·Granted Jul 28, 2009·22 cites·22 claims
- 0486US6664121B2Method and apparatus for position measurement of a pattern formed by a lithographic exposure toolNIKON PREC INC·Filed 2002·Granted Dec 16, 2003·38 cites·30 claims
- 0582US6449031B1Method for use of a critical dimensional test structureNIKON CORP·Filed 2000·Granted Sep 10, 2002·17 cites·13 claims
- 0681US5835227AMethod and apparatus for determining performance characteristics in lithographic toolsNIKON PRECISION INC·Filed 1997·Granted Nov 10, 1998·48 cites·54 claims
- 0776US8049903B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2011·Granted Nov 1, 2011·3 cites·16 claims
- 0876US6094256AMethod for forming a critical dimension test structure and its useNIKON PRECISION INC·Filed 1998·Granted Jul 25, 2000·29 cites·17 claims
- 0970US9303137B2Nanocomposite material containing alumina nanofibers and method for making sameANF TECHNOLOGY LTD·Filed 2013·Granted Apr 5, 2016·1 cites·6 claims
- 1051US6538753B2Method and apparatus for dimension measurement of a pattern formed by lithographic exposure toolsNIKON PREC INC·Filed 2001·Granted Mar 25, 2003·6 cites·60 claims
- 1150US7245352B2Alignment using latent imagesINTEL CORP·Filed 2004·Granted Jul 17, 2007·2 cites·30 claims
- 1249US2016114500A1Method and apparatus for producing a carbon-fiber-reinforced polymers additiuonally reinforced by alumina nanofibersGRODNENSKY ILYA·Filed 2014·Application pending·0 cites
- 1348US9499673B2Method and apparatus for producing a nanocomposite material reinforced by unidirectionally oriented pre-dispersed alumina nanofibersANF TECH LTD·Filed 2013·Granted Nov 22, 2016·0 cites·20 claims
- 1448US6956659B2Measurement of critical dimensions of etched featuresNIKON PREC INC·Filed 2002·Granted Oct 18, 2005·4 cites·30 claims
- 1545US8809436B1Apparatus and method for producing coatings reinforced with alumina nanofibersANF TECHNOLOGY LTD·Filed 2013·Granted Aug 19, 2014·0 cites·10 claims
- 1642US6323938B1Method of characterizing photolithographic tool performance and photolithographic tool thereofNIKON PREC INC·Filed 1998·Granted Nov 27, 2001·8 cites·5 claims
- 1742US2015246850A1Alumina nanofiber reinforced cement-based materials and method for producing sameANF TECHNOLOGY LTD·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →