Inventor · disambiguated record
Ilia Kalinovski
Also filed as: KALINOVSKI ILIA
9 granted patents·5 pending applications·115 citations·filing 2004–2023
87Inventor score
Top patents by PatentIndex Score
14 records- 0192US7585777B1Photoresist strip method for low-k dielectricsNOVELLUS SYSTEMS INC·Filed 2007·Granted Sep 8, 2009·25 cites·20 claims
- 0291US8058178B1Photoresist strip method for low-k dielectricsGOTO HARUHIRO HARRY·Filed 2009·Granted Nov 15, 2011·22 cites·11 claims
- 0390US7288484B1Photoresist strip method for low-k dielectricsNOVELLUS SYSTEMS INC·Filed 2004·Granted Oct 30, 2007·53 cites·36 claims
- 0487US10267728B2Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing systemLAM RES CORP·Filed 2017·Granted Apr 23, 2019·3 cites·28 claims
- 0579US8721797B2Enhanced passivation process to protect silicon prior to high dose implant stripCHEUNG DAVID·Filed 2010·Granted May 13, 2014·6 cites·13 claims
- 0674US10068781B2Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasmaLAM RES CORP·Filed 2014·Granted Sep 4, 2018·4 cites·30 claims
- 0774US9564344B2Ultra low silicon loss high dose implant stripNOVELLUS SYSTEMS INC·Filed 2015·Granted Feb 7, 2017·2 cites·21 claims
- 0855US2025218819A1Radiative heat windows and wafer support pads in vapor etch reactorsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0955US2025216268A1Dual sensor wafer temperature measurement systemLAM RES CORP·Filed 2023·Application pending·0 cites
- 1053US2025273441A1Liquid-cooled optical window for semiconductor processing chamberLAM RES CORP·Filed 2023·Application pending·0 cites
- 1152US2011143548A1Ultra low silicon loss high dose implant stripCHEUNG DAVID·Filed 2009·Application pending·0 cites
- 1250US12467147B2Vapor cleaning of substrate surfacesLAM RES CORP·Filed 2020·Granted Nov 11, 2025·0 cites·12 claims
- 1346US10109476B2Substrate processing method for depositing a barrier layer to prevent photoresist poisoningLAM RES CORP·Filed 2017·Granted Oct 23, 2018·0 cites·20 claims
- 1445US2012108072A1Showerhead configurations for plasma reactorsANGELOV IVELIN A·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →