Inventor · disambiguated record
Inna Shmurun
Also filed as: SHMURUN INNA
13 granted patents·5 pending applications·890 citations·filing 1996–2017
94Inventor score
Top patents by PatentIndex Score
18 records- 0196US7500445B2Method and apparatus for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2003·Granted Mar 10, 2009·187 cites·2 claims
- 0296US6946033B2Heated gas distribution plate for a processing chamberAPPLIED MATERIALS INC·Filed 2002·Granted Sep 20, 2005·227 cites·17 claims
- 0394US6019848ALid assembly for high temperature processing chamberAPPLIED MATERIALS INC·Filed 1996·Granted Feb 1, 2000·212 cites·13 claims
- 0493US7909595B2Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sectionsAPPLIED MATERIALS INC·Filed 2007·Granted Mar 22, 2011·18 cites·7 claims
- 0592US6495233B1Apparatus for distributing gases in a chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·77 cites·24 claims
- 0687US7464717B2Method for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2006·Granted Dec 16, 2008·8 cites·11 claims
- 0786US6645303B2Heater/lift assembly for high temperature processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Nov 11, 2003·75 cites·33 claims
- 0878US6506994B2Low profile thick film heaters in multi-slot bake chamberAPPLIED MATERIALS INC·Filed 2001·Granted Jan 14, 2003·22 cites·36 claims
- 0977US8597011B2Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sectionsKASZUBA ANDRZEI·Filed 2010·Granted Dec 3, 2013·3 cites·18 claims
- 1075US7628863B2Heated gas box for PECVD applicationsAPPLIED MATERIALS INC·Filed 2004·Granted Dec 8, 2009·20 cites·10 claims
- 1173US6300255B1Method and apparatus for processing semiconductive wafersAPPLIED MATERIALS INC·Filed 1999·Granted Oct 9, 2001·40 cites·11 claims
- 1268US7654224B2Method and apparatus for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2009·Granted Feb 2, 2010·1 cites·17 claims
- 1359US2017121813A1Method and apparatus for cleaning a cvd chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1458US2014158048A1Method and apparatus for cleaning a cvd chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1553US7465357B2Computer-readable medium that contains software for executing a method for cleaning a CVD chamberAPPLIED MATERIALS INC·Filed 2006·Granted Dec 16, 2008·0 cites·14 claims
- 1650US2010095891A1Method and apparatus for cleaning a cvd chamberZHAO MAOSHENG·Filed 2010·Application pending·0 cites
- 1741US2004052969A1Methods for operating a chemical vapor deposition chamber using a heated gas distribution plateAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 1838US2004118519A1Blocker plate bypass design to improve clean rate at the edge of the chamberAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →