Inventor · disambiguated record
Iqbal Shareef
Also filed as: SHAREEF IQBAL · SHAREEF IQBAL A
34 granted patents·2 pending applications·352 citations·filing 1998–2021
97Inventor score
Top patents by PatentIndex Score
36 records- 0196US10022689B2Fluid mixing hub for semiconductor processing toolLAM RES CORP·Filed 2015·Granted Jul 17, 2018·15 cites·20 claims
- 0294US10128087B2Configuration independent gas delivery systemLAM RES CORP·Filed 2015·Granted Nov 13, 2018·8 cites·19 claims
- 0392US10943769B2Gas distributor and flow verifierLAM RES CORP·Filed 2018·Granted Mar 9, 2021·6 cites·20 claims
- 0492US7176405B2Heat shield for thermal processingULTRATECH INC·Filed 2005·Granted Feb 13, 2007·17 cites·22 claims
- 0591US7881886B1Methods for performing transient flow prediction and verification using discharge coefficientsLAM RES CORP·Filed 2007·Granted Feb 1, 2011·26 cites·9 claims
- 0689US8521461B2Apparatus for delivering a process gasSHAREEF IQBAL A·Filed 2012·Granted Aug 27, 2013·10 cites·21 claims
- 0788US9091397B2Shared gas panels in plasma processing chambers employing multi-zone gas feedsSHAREEF IQBAL·Filed 2012·Granted Jul 28, 2015·5 cites·10 claims
- 0888US6778762B1Sloped chamber top for substrate processingNOVELLUS SYSTEMS INC·Filed 2002·Granted Aug 17, 2004·67 cites·22 claims
- 0987US8794267B2Gas transport delay resolution for short etch recipesSHAREEF IQBAL·Filed 2008·Granted Aug 5, 2014·17 cites·16 claims
- 1085US10431431B2Gas supply delivery arrangement including a gas splitter for tunable gas flow controlLAM RES CORP·Filed 2015·Granted Oct 1, 2019·6 cites·9 claims
- 1185US9090972B2Gas supply systems for substrate processing chambers and methods thereforLAM RES CORP·Filed 2012·Granted Jul 28, 2015·6 cites·18 claims
- 1285US6079353AChamber for reducing contamination during chemical vapor depositionQUESTER TECHNOLOGY INC·Filed 1998·Granted Jun 27, 2000·60 cites·29 claims
- 1384US8340827B2Methods for controlling time scale of gas delivery into a processing chamberYUN GUNSU·Filed 2009·Granted Dec 25, 2012·29 cites·15 claims
- 1483US8851113B2Shared gas panels in plasma processing systemsTASKAR MARK·Filed 2012·Granted Oct 7, 2014·8 cites·19 claims
- 1577US9721763B2Systems and methods for providing gases to a process chamberLAM RES CORP·Filed 2015·Granted Aug 1, 2017·2 cites·14 claims
- 1677US7822570B2Methods for performing actual flow verificationLAM RES CORP·Filed 2007·Granted Oct 26, 2010·8 cites·19 claims
- 1777US6114227AChamber for reducing contamination during chemical vapor depositionQUESTER TECHNOLOGY INC·Filed 1999·Granted Sep 5, 2000·38 cites·31 claims
- 1875US9778083B2Metrology method for transient gas flowLAM RES CORP·Filed 2013·Granted Oct 3, 2017·2 cites·20 claims
- 1971US11532460B2Gas mixerLAM RES CORP·Filed 2021·Granted Dec 20, 2022·0 cites·20 claims
- 2069US9335768B2Cluster mass flow devices and multi-line mass flow devices incorporating the sameLAM RES CORP·Filed 2013·Granted May 10, 2016·4 cites·20 claims
- 2168US10002747B2Methods and apparatus for supplying process gas in a plasma processing systemSHAREEF IQBAL·Filed 2012·Granted Jun 19, 2018·2 cites·11 claims
- 2267US9004086B2Methods and apparatus for displacing fluids from substrates using supercritical CO2NIXON RONDA K·Filed 2010·Granted Apr 14, 2015·4 cites·15 claims
- 2365US9721782B2Method and apparatus for shaping a gas profile near bevel edgeCHEN JACK·Filed 2011·Granted Aug 1, 2017·1 cites·6 claims
- 2464US9364870B2Ultrasonic cleaning method and apparatus thereforeLAM RES CORP·Filed 2015·Granted Jun 14, 2016·1 cites·4 claims
- 2561US7731798B2Heated chuck for laser thermal processingULTRATECH INC·Filed 2004·Granted Jun 8, 2010·8 cites·36 claims
- 2659US11662237B2MEMS coriolis gas flow controllerLAM RES CORP·Filed 2019·Granted May 30, 2023·0 cites·17 claims
- 2759US9580360B2Monolithic ceramic component of gas delivery system and method of making and use thereofLAM RES CORP·Filed 2015·Granted Feb 28, 2017·1 cites·9 claims
- 2859US8150646B2Methods for delivering a process gasSHAREEF IQBAL A·Filed 2010·Granted Apr 3, 2012·1 cites·20 claims
- 2955US7981307B2Method and apparatus for shaping gas profile near bevel edgeLAM RES CORP·Filed 2007·Granted Jul 19, 2011·0 cites·20 claims
- 3054US10760944B2Hybrid flow metrology for improved chamber matchingLAM RES CORP·Filed 2018·Granted Sep 1, 2020·0 cites·28 claims
- 3150US9175808B2System and method for decreasing scrubber exhaust from gas delivery panelsTASKAR MARK·Filed 2011·Granted Nov 3, 2015·0 cites·11 claims
- 3250US2023238253A1Gas box with cross-flow exhaust systemLAM RES CORP·Filed 2021·Application pending·0 cites
- 3347US9174249B2Ultrasonic cleaning method and apparatus thereforeLAM RES CORP·Filed 2012·Granted Nov 3, 2015·0 cites·19 claims
- 3446US9704761B2Corrosion sensor retainer assembly apparatus and method for detecting corrosionLAM RES CORP·Filed 2014·Granted Jul 11, 2017·0 cites·20 claims
- 3543US2015155187A1Annular baffle for pumping from above a plane of the semiconductor wafer supportLAM RES CORP·Filed 2013·Application pending·0 cites
- 3639US7326877B2Laser thermal processing chuck with a thermal compensating heater moduleULTRATECH INC·Filed 2004·Granted Feb 5, 2008·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →