Inventor · disambiguated record
Irit Tzemah
Also filed as: TZEMAH IRIT
3 granted patents·6 citations·filing 2017–2019
57Inventor score
Top patents by PatentIndex Score
3 records- 0187US11175593B2Alignment sensor apparatus for process sensitivity compensationASML NETHERLANDS BV·Filed 2019·Granted Nov 16, 2021·4 cites·38 claims
- 0279US10488767B2Alignment system wafer stack beam analyzerASML HOLDING NV·Filed 2017·Granted Nov 26, 2019·2 cites·20 claims
- 0343US10895813B2Lithographic cluster, lithographic apparatus, and device manufacturing methodASML HOLDING NV·Filed 2018·Granted Jan 19, 2021·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →