Inventor · disambiguated record
James Akutsu
Also filed as: AKUTSU JAMES · AKUTSU JAMES S
1 granted patent·2 pending applications·49 citations·filing 2004–2005
55Inventor score
Top patents by PatentIndex Score
3 records- 0192US7286218B2System and method for inspecting a workpiece surface using surface structure spatial frequenciesKLA TENCOR TECH CORP·Filed 2005·Granted Oct 23, 2007·49 cites·14 claims
- 0238US2004258295A1Method and system for classifying defects occurring at a surface of a substrate using graphical representation of multi-channel dataADE CORP·Filed 2004·Application pending·0 cites
- 0336US2004252879A1Method and system for analyzing and tracking defects among a plurality of substrates such as silicon wafersADE CORP·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →