Inventor · disambiguated record
James W. Caughran
Also filed as: CAUGHRAN JAMES · CAUGHRAN JAMES W
7 granted patents·1,615 citations·filing 1996–2001
90Inventor score
Top patents by PatentIndex Score
7 records- 0198US7017514B1Method and apparatus for plasma optimization in water processingNOVELLUS SYSTEMS INC·Filed 2001·Granted Mar 28, 2006·591 cites·23 claims
- 0296US5667592AProcess chamber sleeve with ring seals for isolating individual process modules in a common clusterGASONICS INTERNATIONAL·Filed 1996·Granted Sep 16, 1997·638 cites·8 claims
- 0392US5662143AModular gas box systemGASONICS INTERNATIONAL·Filed 1996·Granted Sep 2, 1997·139 cites·9 claims
- 0489US5863170AModular process systemGASONICS INTERNATIONAL·Filed 1996·Granted Jan 26, 1999·129 cites·7 claims
- 0587US5855465ASemiconductor wafer processing carouselGASONICS INTERNATIONAL·Filed 1996·Granted Jan 5, 1999·110 cites·6 claims
- 0633US6175095B1Resonant impedance-matching slow-wave ring structure microwave applicator for plasmasGASONICS INTERNAT·Filed 1999·Granted Jan 16, 2001·3 cites·8 claims
- 0732US6211621B1Energy transfer microwave plasma sourceGASONICS INTERNAT·Filed 1999·Granted Apr 3, 2001·5 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →