Inventor · disambiguated record
James A. Fair
Also filed as: FAIR JAMES A · FAIR JAMES ALBERT
21 granted patents·5 pending applications·3,203 citations·filing 1983–2014
97Inventor score
Top patents by PatentIndex Score
26 records- 0198US7897215B1Sequential UV induced chemical vapor depositionNOVELLUS SYSTEMS INC·Filed 2003·Granted Mar 1, 2011·524 cites·20 claims
- 0298US7691749B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 6, 2010·97 cites·18 claims
- 0398US6720260B1Sequential electron induced chemical vapor depositionNOVELLUS SYSTEMS INC·Filed 2003·Granted Apr 13, 2004·485 cites·16 claims
- 0498US6627268B1Sequential ion, UV, and electron induced chemical vapor depositionNOVELLUS SYSTEMS INC·Filed 2001·Granted Sep 30, 2003·490 cites·23 claims
- 0597US7144806B1ALD of tantalum using a hydride reducing agentNOVELLUS SYSTEMS INC·Filed 2002·Granted Dec 5, 2006·312 cites·20 claims
- 0697US7005372B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2003·Granted Feb 28, 2006·187 cites·46 claims
- 0797US6849122B1Thin layer metal chemical vapor depositionNOVELLUS SYSTEMS INC·Filed 2002·Granted Feb 1, 2005·115 cites·26 claims
- 0897US6844258B1Selective refractory metal and nitride cappingNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·260 cites·55 claims
- 0997US6464779B1Copper atomic layer chemical vapor despositionNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 15, 2002·195 cites·20 claims
- 1095US4565157AMethod and apparatus for deposition of tungsten silicidesGENUS INC·Filed 1983·Granted Jan 21, 1986·110 cites·25 claims
- 1194US7107998B2Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatusNOVELLUS SYSTEMS INC·Filed 2003·Granted Sep 19, 2006·74 cites·27 claims
- 1294US6905543B1Methods of forming tungsten nucleation layerNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 14, 2005·68 cites·34 claims
- 1393US7157798B1Selective refractory metal and nitride cappingNOVELLUS SYSTEMS INC·Filed 2004·Granted Jan 2, 2007·68 cites·13 claims
- 1489US8864935B2Plasma generator apparatusFAIR JAMES A·Filed 2012·Granted Oct 21, 2014·23 cites·19 claims
- 1585US5741363AInteriorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor depositionADVANCED TECH MATERIALS·Filed 1996·Granted Apr 21, 1998·59 cites·18 claims
- 1680US7014709B1Thin layer metal chemical vapor depositionNOVELLUS SYSTEMS INC·Filed 2004·Granted Mar 21, 2006·18 cites·15 claims
- 1778US6010748AMethod of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injectorADVANCED TECH MATERIALS·Filed 1998·Granted Jan 4, 2000·40 cites·7 claims
- 1877US5208643AMethod of and apparatus for non-contact temperature measurementVARIAN ASSOCIATES·Filed 1990·Granted May 4, 1993·45 cites·25 claims
- 1969US7176140B1Adhesion promotion for etch by-productsNOVELLUS SYSTEMS INC·Filed 2004·Granted Feb 13, 2007·12 cites·19 claims
- 2053US2015075718A1Plasma generator apparatusNOVELLUS SYSTEMS INC·Filed 2014·Application pending·0 cites
- 2150US4920908AMethod and apparatus for deposition of tungsten silicidesGENUS INC·Filed 1989·Granted May 1, 1990·13 cites·1 claims
- 2249US2008156264A1Plasma Generator ApparatusNOVELLUS SYSTEMS INC·Filed 2006·Application pending·0 cites
- 2345US2008216958A1Plasma Reaction Apparatus Having Pre-Seasoned Showerheads and Methods for Manufacturing the SameNOVELLUS SYSTEMS INC·Filed 2007·Application pending·0 cites
- 2445US2008156631A1Methods of Producing Plasma in a ContainerNOVELLUS SYSTEMS INC·Filed 2006·Application pending·0 cites
- 2542US5751019AMethod and structure for reducing short circuits between overlapping conductorsVARIAN ASSOCIATES·Filed 1994·Granted May 12, 1998·8 cites·7 claims
- 2639US2011198957A1Jafstar systemFAIR JAMES ALBERT·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →