Inventor · disambiguated record
James C. Vetter
Also filed as: VETTER JAMES C · VETTER JAMES CHRIS
6 granted patents·1 pending application·11 citations·filing 2002–2021
75Inventor score
Top patents by PatentIndex Score
7 records- 0180US9659757B2Measuring and controlling wafer potential in pulsed RF bias processingLAM RES CORP·Filed 2012·Granted May 23, 2017·4 cites·11 claims
- 0263US8192576B2Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processingKUTHI ANDRAS·Filed 2007·Granted Jun 5, 2012·2 cites·22 claims
- 0350US6946303B2Electronically diagnosing a component in a process line using a substrate signatureLAM RES CORP·Filed 2002·Granted Sep 20, 2005·3 cites·6 claims
- 0447US8303763B2Measuring and controlling wafer potential in pulsed RF bias processingKUTHI ANDRAS·Filed 2012·Granted Nov 6, 2012·0 cites·10 claims
- 0547US6890774B2System and method for creating a substrate signatureLAM RES CORP·Filed 2002·Granted May 10, 2005·2 cites·8 claims
- 0642US2021305017A1Inductively coupled plasma chamber heater for controlling dielectric window temperatureLAM RES CORP·Filed 2021·Application pending·0 cites
- 0736US10854492B2Edge ring assembly for improving feature profile tilting at extreme edge of waferLAM RES CORP·Filed 2016·Granted Dec 1, 2020·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →