Inventor · disambiguated record
Jean-Marc Girard
Also filed as: GIRARD JEAN-MARC
78 granted patents·41 pending applications·985 citations·filing 1986–2024
99Inventor score
Files withAIR LIQUIDE73AIR LIQUIDE AMERICAN7L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude6AIR LIQUIDE ADVANCED MAT INC2AIR LIQUIDE ELECTRONICS US LP2
Top patents by PatentIndex Score
119 records- 0198US7064083B2Hexakis(monohydrocarbylamino)disilanes and method for the preparation thereofAIR LIQUIDE·Filed 2005·Granted Jun 20, 2006·48 cites·3 claims
- 0297US10192734B2Short inorganic trisilylamine-based polysilazanes for thin film depositionAIR LIQUIDE ADVANCED MAT INC·Filed 2017·Granted Jan 29, 2019·337 cites·11 claims
- 0397US7482286B2Method for forming dielectric or metallic filmsAIR LIQUIDE·Filed 2005·Granted Jan 27, 2009·44 cites·19 claims
- 0497US7019159B2Hexakis(monohydrocarbylamino) disilanes and method for the preparation thereofAIR LIQUIDE·Filed 2002·Granted Mar 28, 2006·77 cites·13 claims
- 0596US7192626B2Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor depositionAIR LIQUIDE·Filed 2003·Granted Mar 20, 2007·115 cites·16 claims
- 0695US11066310B2Tungsten pentachloride conditioning and crystalline phase manipulationAIR LIQUIDE·Filed 2020·Granted Jul 20, 2021·3 cites·4 claims
- 0795US10384944B2Preparation of Si—H containing iodosilanes via halide exchange reactionAIR LIQUIDE·Filed 2017·Granted Aug 20, 2019·10 cites·10 claims
- 0895US9777025B2Si-containing film forming precursors and methods of using the sameL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2015·Granted Oct 3, 2017·12 cites·27 claims
- 0993US8357430B2Method for producing silicon nitride filmsAIR LIQUIDE·Filed 2005·Granted Jan 22, 2013·22 cites·4 claims
- 1093US6936548B2Method for depositing silicon nitride films and silicon oxynitride films by chemical vapor depositionAIR LIQUIDE·Filed 2002·Granted Aug 30, 2005·52 cites·32 claims
- 1190US8853075B2Method for forming a titanium-containing layer on a substrate using an atomic layer deposition (ALD) processGATINEAU SATOKO·Filed 2009·Granted Oct 7, 2014·14 cites·20 claims
- 1289US11699584B2Si-containing film forming precursors and methods of using the sameAIR LIQUIDE·Filed 2021·Granted Jul 11, 2023·1 cites·18 claims
- 1389US10899630B2Tungsten pentachloride conditioning and crystalline phase manipulationAIR LIQUIDE·Filed 2018·Granted Jan 26, 2021·2 cites·14 claims
- 1488US10584039B2Titanium-containing film forming compositions for vapor deposition of titanium-containing filmsAIR LIQUIDE·Filed 2017·Granted Mar 10, 2020·2 cites·17 claims
- 1587US10364259B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2016·Granted Jul 30, 2019·2 cites·21 claims
- 1687US8343860B1High C content molecules for C implantAIR LIQUIDE·Filed 2011·Granted Jan 1, 2013·8 cites·9 claims
- 1786US11124876B2Si-containing film forming precursors and methods of using the sameAIR LIQUIDE·Filed 2019·Granted Sep 21, 2021·3 cites·16 claims
- 1886US10106425B2Synthesis methods for halosilanesAIR LIQUIDE ADVANCED MAT INC·Filed 2016·Granted Oct 23, 2018·3 cites·13 claims
- 1985US10710896B2Tungsten pentachloride conditioning and crystalline phase manipulationAIR LIQUIDE·Filed 2018·Granted Jul 14, 2020·3 cites·10 claims
- 2085US10689405B2Titanium-containing film forming compositions for vapor deposition of titanium-containing filmsAIR LIQUIDE·Filed 2018·Granted Jun 23, 2020·1 cites·13 claims
- 2185US9633838B2Vapor deposition of silicon-containing films using penta-substituted disilanesL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2015·Granted Apr 25, 2017·4 cites·5 claims
- 2285US6442736B1Semiconductor processing system and method for controlling moisture level thereinAIR LIQUIDE·Filed 2000·Granted Aug 27, 2002·33 cites·38 claims
- 2383US10403494B2Si-containing film forming precursors and methods of using the sameAIR LIQUIDE·Filed 2017·Granted Sep 3, 2019·2 cites·17 claims
- 2483US8367531B1Aluminum implant using new compoundsAIR LIQUIDE·Filed 2011·Granted Feb 5, 2013·5 cites·9 claims
- 2582US8859797B1Synthesis methods for carbosilanesAIR LIQUIDE ELECTRONICS US LP·Filed 2013·Granted Oct 14, 2014·3 cites·5 claims
- 2681US11821080B2Reagents to remove oxygen from metal oxyhalide precursors in thin film deposition processesAIR LIQUIDE·Filed 2021·Granted Nov 21, 2023·1 cites·19 claims
- 2777US11577967B2Tungsten pentachloride conditioning and crystalline phase manipulationAIR LIQUIDE·Filed 2020·Granted Feb 14, 2023·0 cites·4 claims
- 2877US10800661B2Preparation of Si-H containing iodosilanes via halide exchange reactionAIR LIQUIDE·Filed 2019·Granted Oct 13, 2020·0 cites·6 claims
- 2975US9969756B2Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereofAIR LIQUIDE AMERICAN·Filed 2015·Granted May 15, 2018·2 cites·20 claims
- 3073US11168099B2Titanium-containing film forming compositions for vapor deposition of titanium-containing filmsAIR LIQUIDE·Filed 2020·Granted Nov 9, 2021·0 cites·15 claims
- 3173US10647578B2N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applicationsAIR LIQUIDE·Filed 2017·Granted May 12, 2020·1 cites·3 claims
- 3273US2025388738A1Polymerization inhibitor composition and method of inhibiting polymerization of distillable disilacyclobutane monomers using the sameAIR LIQUIDE·Filed 2024·Application pending·0 cites
- 3372US11739220B2Perhydropolysilazane compositions and methods for forming oxide films using sameAIR LIQUIDE·Filed 2019·Granted Aug 29, 2023·1 cites·17 claims
- 3472US6328801B1Method and system for recovering and recirculating a deuterium-containing gasAIR LIQUIDE·Filed 1998·Granted Dec 11, 2001·39 cites·8 claims
- 3571US2020032397A1Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2019·Application pending·0 cites
- 3671US2020407228A1Preparation of si-h containing iodosilanes via halide exchange reactionAIR LIQUIDE·Filed 2020·Application pending·0 cites
- 3770US12497691B2Devices having a rare earth (oxy) fluoride coating for improved resistance to corrosive chemical environments and methods for making and using these devicesAIR LIQUIDE·Filed 2021·Granted Dec 16, 2025·0 cites·8 claims
- 3869US11806677B2Preprocessing method for solid material, and solid material product filled with solid material manufactured using said solid material preprocessing methodAIR LIQUIDE·Filed 2018·Granted Nov 7, 2023·1 cites·4 claims
- 3969US11021793B2Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing filmsAIR LIQUIDE·Filed 2018·Granted Jun 1, 2021·0 cites·2 claims
- 4069US10669160B2Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalideAIR LIQUIDE·Filed 2018·Granted Jun 2, 2020·0 cites·18 claims
- 4169US9187511B2Titanium-aluminum alloy deposition with titanium-tetrahydroaluminate bimetallic moleculesL AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE·Filed 2013·Granted Nov 17, 2015·1 cites·16 claims
- 4268US6810897B2Process gas supply mechanism for ALCVD systemsAIR LIQUIDE·Filed 2002·Granted Nov 2, 2004·9 cites·26 claims
- 4368US2025051373A1New inorganic silyl and polysilyl derivatives of group v elements and methods of synthesizing the same and methods of using the same for depositionAIR LIQUIDE·Filed 2022·Application pending·0 cites
- 4467US12173403B2Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing filmsAIR LIQUIDE·Filed 2021·Granted Dec 24, 2024·0 cites·4 claims
- 4567US11242597B2Lanthanide precursors and deposition of lanthanide-containing films using the sameAIR LIQUIDE·Filed 2020·Granted Feb 8, 2022·0 cites·10 claims
- 4667US10895012B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameLAIR LIQUIDE SA POUR LETUDE ET LEXPLOITATION DES PROCEDES GEROGES CLAUDE·Filed 2019·Granted Jan 19, 2021·0 cites·17 claims
- 4767US10337104B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2016·Granted Jul 2, 2019·0 cites·20 claims
- 4866US10501484B2Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereofAIR LIQUIDE·Filed 2018·Granted Dec 10, 2019·0 cites·20 claims
- 4966US9073952B1Synthesis method for carbosilanesWAN ZHIWEN·Filed 2012·Granted Jul 7, 2015·1 cites·4 claims
- 5065US10465289B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2016·Granted Nov 5, 2019·0 cites·9 claims
Showing the top 50 of 119 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →