Inventor · disambiguated record
Jen Shu
Also filed as: SHU JEN
11 granted patents·1,037 citations·filing 1999–2013
92Inventor score
Files withAPPLIED MATERIALS INC3NAT SEMICONDUCTOR CORP3NOVELLUS SYSTEMS INC2CHEN HUI W1MEBARKI BENCHERKI1
Top patents by PatentIndex Score
11 records- 0199US6632478B2Process for forming a low dielectric constant carbon-containing filmAPPLIED MATERIALS INC·Filed 2001·Granted Oct 14, 2003·658 cites·46 claims
- 0297US6576345B1Dielectric films with low dielectric constantsNOVELLUS SYSTEMS INC·Filed 2000·Granted Jun 10, 2003·110 cites·45 claims
- 0397US6340628B1Method to deposit SiOCH films with dielectric constant below 3.0NOVELLUS SYSTEMS INC·Filed 2000·Granted Jan 22, 2002·166 cites·22 claims
- 0495US8008208B2Method of cleaning and forming a negatively charged passivation layer over a doped regionAPPLIED MATERIALS INC·Filed 2010·Granted Aug 30, 2011·13 cites·15 claims
- 0584US8084310B2Self-aligned multi-patterning for advanced critical dimension contactsMEBARKI BENCHERKI·Filed 2009·Granted Dec 27, 2011·11 cites·16 claims
- 0681US6348421B1Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVDNAT SEMICONDUCTOR CORP·Filed 1999·Granted Feb 19, 2002·54 cites·10 claims
- 0770US9184333B2Contact and interconnect metallization for solar cellsAPPLIED MATERIALS INC·Filed 2013·Granted Nov 10, 2015·2 cites·13 claims
- 0867US6383933B1Method of using organic material to enhance STI planarization or other planarization processesNAT SEMICONDUCTOR CORP·Filed 2000·Granted May 7, 2002·14 cites·50 claims
- 0963US8268728B2Method of cleaning and forming a negatively charged passivation layer over a doped regionSTEWART MICHAEL P·Filed 2011·Granted Sep 18, 2012·0 cites·20 claims
- 1063US6593615B1Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVDNAT SEMICONDUCTOR CORP·Filed 2001·Granted Jul 15, 2003·7 cites·6 claims
- 1159US8293460B2Double exposure patterning with carbonaceous hardmaskCHEN HUI W·Filed 2008·Granted Oct 23, 2012·2 cites·8 claims
Join the waitlist — get patent alerts
Get an alert when Jen Shu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →