Inventor · disambiguated record
John Daugherty
Also filed as: DAUGHERTY JOHN · DAUGHERTY JOHN E · DAUGHERTY JOHN EDWARD · DAUGHERTY JOHN P
74 granted patents·33 pending applications·1,154 citations·filing 1997–2025
99Inventor score
Top patents by PatentIndex Score
107 records- 0197US9972478B2Method and process of implementing machine learning in complex multivariate wafer processing equipmentLAM RES CORP·Filed 2016·Granted May 15, 2018·23 cites·14 claims
- 0297US6537429B2Diamond coatings on reactor wall and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Mar 25, 2003·110 cites·31 claims
- 0396US8292698B1On-line chamber cleaning using dry ice blastingSHIH HONG·Filed 2007·Granted Oct 23, 2012·67 cites·20 claims
- 0496US7300537B2Productivity enhancing thermal sprayed yttria-containing coating for plasma reactorLAM RES CORP·Filed 2004·Granted Nov 27, 2007·64 cites·18 claims
- 0595US10615009B2System implementing machine learning in complex multivariate wafer processing equipmentLAM RES CORP·Filed 2018·Granted Apr 7, 2020·10 cites·16 claims
- 0695US7311797B2Productivity enhancing thermal sprayed yttria-containing coating for plasma reactorLAM RES CORP·Filed 2002·Granted Dec 25, 2007·50 cites·19 claims
- 0794US9873940B2Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2014·Granted Jan 23, 2018·16 cites·9 claims
- 0894US9502275B1Service tunnel for use on capital equipment in semiconductor manufacturing and research fabsLAM RES CORP·Filed 2015·Granted Nov 22, 2016·13 cites·17 claims
- 0994US6620520B2Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereofLAM RES CORP·Filed 2000·Granted Sep 16, 2003·54 cites·11 claims
- 1094US6533910B2Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Mar 18, 2003·62 cites·21 claims
- 1193US6830622B2Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereofLAM RES CORP·Filed 2001·Granted Dec 14, 2004·63 cites·29 claims
- 1293US6776851B1In-situ cleaning of a polymer coated plasma processing chamberLAM RES CORP·Filed 2002·Granted Aug 17, 2004·49 cites·13 claims
- 1392US11393705B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2020·Granted Jul 19, 2022·2 cites·16 claims
- 1492US7685965B1Apparatus for shielding process chamber portLAM RES CORP·Filed 2006·Granted Mar 30, 2010·17 cites·10 claims
- 1592US7250114B2Methods of finishing quartz glass surfaces and components made by the methodsLAM RES CORP·Filed 2003·Granted Jul 31, 2007·36 cites·10 claims
- 1692US6344105B1Techniques for improving etch rate uniformityLAM RES CORP·Filed 1999·Granted Feb 5, 2002·141 cites·29 claims
- 1791US10557197B2Monolithic gas distribution manifold and various construction techniques and use cases thereforLAM RES CORP·Filed 2015·Granted Feb 11, 2020·4 cites·19 claims
- 1891US7255898B2Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereofLAM RES CORP·Filed 2003·Granted Aug 14, 2007·29 cites·11 claims
- 1991US6613442B2Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Sep 2, 2003·49 cites·15 claims
- 2089US11112773B2Systems for removing and replacing consumable parts from a semiconductor process module in situLAM RES CORP·Filed 2017·Granted Sep 7, 2021·5 cites·18 claims
- 2189US7402258B2Methods of removing metal contaminants from a component for a plasma processing apparatusLAM RES CORP·Filed 2006·Granted Jul 22, 2008·11 cites·6 claims
- 2288US7138067B2Methods and apparatus for tuning a set of plasma processing stepsLAM RES CORP·Filed 2004·Granted Nov 21, 2006·41 cites·9 claims
- 2386US11031215B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2019·Granted Jun 8, 2021·3 cites·7 claims
- 2486US7605086B2Corrosion resistant component of semiconductor processing equipment and method of manufacture thereofLAM RES CORP·Filed 2006·Granted Oct 20, 2009·8 cites·13 claims
- 2586US6016766AMicrowave plasma processorLAM RES CORP·Filed 1997·Granted Jan 25, 2000·54 cites·16 claims
- 2685US11710623B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2021·Granted Jul 25, 2023·1 cites·11 claims
- 2785US6773751B2Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2003·Granted Aug 10, 2004·26 cites·15 claims
- 2884US10967407B2Conditioning chamber componentLAM RES CORP·Filed 2018·Granted Apr 6, 2021·3 cites·11 claims
- 2984US9123651B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2013·Granted Sep 1, 2015·6 cites·12 claims
- 3084US7234222B1Methods and apparatus for optimizing the delivery of a set of gases in a plasma processing systemLAM RES CORP·Filed 2003·Granted Jun 26, 2007·21 cites·18 claims
- 3182US9314854B2Ductile mode drilling methods for brittle components of plasma processing apparatusesLAM RES CORP·Filed 2013·Granted Apr 19, 2016·10 cites·19 claims
- 3282US7578889B2Methodology for cleaning of surface metal contamination from electrode assembliesLAM RES CORP·Filed 2007·Granted Aug 25, 2009·9 cites·18 claims
- 3381US9546432B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2015·Granted Jan 17, 2017·3 cites·10 claims
- 3481US9337002B2Corrosion resistant aluminum coating on plasma chamber componentsLAM RES CORP·Filed 2013·Granted May 10, 2016·6 cites·21 claims
- 3581US8097105B2Extending lifetime of yttrium oxide as a plasma chamber materialSHIH HONG·Filed 2007·Granted Jan 17, 2012·5 cites·11 claims
- 3680US6821378B1Pump baffle and screen to improve etch uniformityLAM RES CORP·Filed 2002·Granted Nov 23, 2004·17 cites·21 claims
- 3779US12198902B2Laminated aerosol deposition coating for aluminum components for plasma processing chambersLAM RES CORP·Filed 2020·Granted Jan 14, 2025·1 cites·8 claims
- 3879US12087561B2Vacuum pump protection against deposition byproduct buildupLAM RES CORP·Filed 2023·Granted Sep 10, 2024·0 cites·6 claims
- 3978US11764086B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2022·Granted Sep 19, 2023·0 cites·18 claims
- 4077US10790174B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2018·Granted Sep 29, 2020·1 cites·10 claims
- 4176US6994769B2In-situ cleaning of a polymer coated plasma processing chamberLAM RES CORP·Filed 2004·Granted Feb 7, 2006·25 cites·9 claims
- 4275US8318035B2Methods of finishing quartz glass surfaces and components made by the methodsKIEHLBAUCH MARK W·Filed 2007·Granted Nov 27, 2012·3 cites·32 claims
- 4374US10914003B2Monolithic gas distribution manifold and various construction techniques and use cases thereforLAM RES CORP·Filed 2019·Granted Feb 9, 2021·0 cites·16 claims
- 4473US8585844B2Extending lifetime of yttrium oxide as a plasma chamber materialSHIH HONG·Filed 2011·Granted Nov 19, 2013·2 cites·12 claims
- 4572US9396912B2Methods for mixed acid cleaning of showerhead electrodesAVOYAN ARMEN·Filed 2012·Granted Jul 19, 2016·1 cites·20 claims
- 4672US6790242B2Fullerene coated component of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Sep 14, 2004·11 cites·30 claims
- 4771US9293305B2Mixed acid cleaning assembliesAVOYAN ARMEN·Filed 2012·Granted Mar 22, 2016·2 cites·20 claims
- 4871US8022718B2Method for inspecting electrostatic chucks with Kelvin probe analysisLAM RES CORP·Filed 2009·Granted Sep 20, 2011·3 cites·11 claims
- 4970US9929028B2Service tunnel for use on capital equipment in semiconductor manufacturing and research fabsLAM RES CORP·Filed 2016·Granted Mar 27, 2018·1 cites·20 claims
- 5070US7578945B2Method and apparatus for tuning a set of plasma processing stepsLAM RES CORP·Filed 2006·Granted Aug 25, 2009·3 cites·15 claims
Showing the top 50 of 107 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →