Inventor · disambiguated record
John Delarios
Also filed as: DELARIOS JOHN · DELARIOS JOHN M · DELARIOS JOHN MARTIN
24 granted patents·4 pending applications·420 citations·filing 1992–2014
96Inventor score
Top patents by PatentIndex Score
28 records- 0191US6770151B1Drying a substrate using a combination of substrate processing technologiesLAM RES CORP·Filed 2002·Granted Aug 3, 2004·55 cites·20 claims
- 0289US7329321B2Enhanced wafer cleaning methodLAM RES CORP·Filed 2005·Granted Feb 12, 2008·13 cites·13 claims
- 0388US5861066AMethod and apparatus for cleaning edges of contaminated substratesONTRAK SYSTEMS INC·Filed 1996·Granted Jan 19, 1999·88 cites·18 claims
- 0484US6334229B1Apparatus for cleaning edges of contaminated substratesLAM RES CORP·Filed 1999·Granted Jan 1, 2002·63 cites·31 claims
- 0583US8591662B2Methods for cleaning a semiconductor substrateFREER ERIK M·Filed 2012·Granted Nov 26, 2013·4 cites·14 claims
- 0682US8316866B2Method and apparatus for cleaning a semiconductor substrateFREER ERIK M·Filed 2006·Granted Nov 27, 2012·6 cites·13 claims
- 0781US7743449B2System and method for a combined contact and non-contact wafer cleaning moduleLAM RES CORP·Filed 2005·Granted Jun 29, 2010·7 cites·14 claims
- 0880US7007333B1System and method for a combined contact and non-contact wafer cleaning moduleLAM RES CORP·Filed 2002·Granted Mar 7, 2006·25 cites·13 claims
- 0979US8522801B2Method and apparatus for cleaning a semiconductor substrateFREER ERIK M·Filed 2006·Granted Sep 3, 2013·6 cites·6 claims
- 1079US5762755AOrganic preclean for improving vapor phase wafer etch uniformityGENUS INC·Filed 1992·Granted Jun 9, 1998·72 cites·7 claims
- 1173US6949411B1Method for post-etch and strip residue removal on coral filmsLAM RES CORP·Filed 2001·Granted Sep 27, 2005·15 cites·24 claims
- 1272US7568488B2Enhanced wafer cleaning methodLAM RES CORP·Filed 2007·Granted Aug 4, 2009·3 cites·6 claims
- 1371US8608859B2Method for removing contamination from a substrate and for making a cleaning solutionFREER ERIK M·Filed 2010·Granted Dec 17, 2013·2 cites·15 claims
- 1470US8062471B2Proximity head heating method and apparatusMIKHAYLICHENKO KATRINA·Filed 2004·Granted Nov 22, 2011·11 cites·12 claims
- 1567US8388762B2Substrate cleaning technique employing multi-phase solutionFREER ERIK M·Filed 2007·Granted Mar 5, 2013·2 cites·18 claims
- 1661US7967916B2Method of preventing pattern collapse during rinsing and dryingLAM RES CORP·Filed 2008·Granted Jun 28, 2011·1 cites·14 claims
- 1760US6729339B1Method and apparatus for cooling a resonator of a megasonic transducerLAM RES CORP·Filed 2002·Granted May 4, 2004·13 cites·12 claims
- 1858US9236279B2Method of dielectric film treatmentYUN SEOKMIN·Filed 2008·Granted Jan 12, 2016·1 cites·17 claims
- 1956US6851436B1Substrate processing using a fluid re-circulation system in a wafer scrubbing systemLAM RES CORP·Filed 2002·Granted Feb 8, 2005·5 cites·16 claims
- 2055US6857435B2Method and apparatus for cooling a resonator of a megasonic transducerLAM RES CORP·Filed 2004·Granted Feb 22, 2005·1 cites·14 claims
- 2155US2014059789A1Apparatus for Cleaning a Semiconductor SubstrateLAM RES CORP·Filed 2013·Application pending·0 cites
- 2252US2014170780A1Method of Low-K Dielectric Film RepairLAM RES CORP·Filed 2014·Application pending·0 cites
- 2349US6200201B1Cleaning/buffer apparatus for use in a wafer processing deviceLAM RES CORP·Filed 1998·Granted Mar 13, 2001·17 cites·18 claims
- 2448US8102014B2Proximity head heating method and apparatusMIKHAYLICHENKO KATRINA·Filed 2010·Granted Jan 24, 2012·0 cites·17 claims
- 2547US8323420B2Method for removing material from semiconductor wafer and apparatus for performing the sameKOROLIK MIKHAIL·Filed 2005·Granted Dec 4, 2012·0 cites·23 claims
- 2643US6267142B1Fluid delivery stablization for wafer preparation systemsLAM RES CORP·Filed 1999·Granted Jul 31, 2001·10 cites·20 claims
- 2743US2015040941A1Method and Apparatus for Cleaning A Semiconductor SubstrateLAM RES CORP·Filed 2013·Application pending·0 cites
- 2843US2015040947A1Method and Systems for Cleaning A SubstrateLAM RES CORP·Filed 2013·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when John Delarios files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →