Inventor · disambiguated record
John Giles Langan
Also filed as: LANGAN JOHN · LANGAN JOHN G · LANGAN JOHN GILES
13 granted patents·6 pending applications·702 citations·filing 1993–2022
94Inventor score
Files withAIR PROD & CHEM10VERSUM MAT US LLC5NOVELLUS SYSTEMS INC2HURLEY PATRICK TIMOTHY1WEIGEL SCOTT JEFFREY1
Top patents by PatentIndex Score
19 records- 0194US5413670AMethod for plasma etching or cleaning with diluted NF3AIR PROD & CHEM·Filed 1993·Granted May 9, 1995·268 cites·8 claims
- 0293US5479727AMoisture removal and passivation of surfacesAIR PROD & CHEM·Filed 1994·Granted Jan 2, 1996·54 cites·15 claims
- 0392US6686594B2On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoringAIR PROD & CHEM·Filed 2001·Granted Feb 3, 2004·53 cites·43 claims
- 0491US6872323B1In situ plasma process to remove fluorine residues from the interior surfaces of a CVD reactorNOVELLUS SYSTEMS INC·Filed 2001·Granted Mar 29, 2005·104 cites·23 claims
- 0588US7479191B1Method for endpointing CVD chamber cleans following ultra low-k film treatmentsNOVELLUS SYSTEMS INC·Filed 2005·Granted Jan 20, 2009·20 cites·19 claims
- 0688US6637998B2Self evacuating micro environment systemAIR PROD & CHEM·Filed 2001·Granted Oct 28, 2003·42 cites·13 claims
- 0786US7013916B1Sub-atmospheric gas delivery method and apparatusAIR PROD & CHEM·Filed 2000·Granted Mar 21, 2006·44 cites·39 claims
- 0884US5626775APlasma etch with trifluoroacetic acid and derivativesAIR PROD & CHEM·Filed 1996·Granted May 6, 1997·73 cites·20 claims
- 0970US8535760B2Additives to silane for thin film silicon photovoltaic devicesHURLEY PATRICK TIMOTHY·Filed 2010·Granted Sep 17, 2013·4 cites·13 claims
- 1069US6023933AUltra high pressure gasesAIR PROD & CHEM·Filed 1997·Granted Feb 15, 2000·28 cites·21 claims
- 1155US6837250B2CVD chamber cleaning using mixed PFCs from capture/recycleAIR PROD & CHEM·Filed 2002·Granted Jan 4, 2005·2 cites·8 claims
- 1255US5910294AAbatement of NF3 with metal oxalatesAIR PROD & CHEM·Filed 1997·Granted Jun 8, 1999·10 cites·10 claims
- 1354US2024425723A1Pad-in-a-bottle chemical mechanical planarization polishing with cost-effective non-porous solid polishing padsVERSUM MAT US LLC·Filed 2022·Application pending·0 cites
- 1454US2025014911A1Pad-in-a-bottle and single platen chemical mechanical-planarization for back-end applicationsVERSUM MAT US LLC·Filed 2022·Application pending·0 cites
- 1553US2024352279A1Pad-in-a-bottle (pib) technology for copper barrier slurriesVERSUM MAT US LLC·Filed 2022·Application pending·0 cites
- 1648US2023287242A1Pad-in-a-bottle (pib) technology for copper and through-silicon via (tsv) chemical-mechanical planarization (cmp)VERSUM MAT US LLC·Filed 2021·Application pending·0 cites
- 1745US2013341178A1Method and Apparatus for Removing Contaminants from Nitrogen TrifluorideAIR PROD & CHEM·Filed 2013·Application pending·0 cites
- 1841US8283260B2Process for restoring dielectric propertiesWEIGEL SCOTT JEFFREY·Filed 2009·Granted Oct 9, 2012·0 cites·8 claims
- 1934US2018047898A1Process for depositing porous organosilicate glass films for use as resistive random access memoryVERSUM MAT US LLC·Filed 2016·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when John Giles Langan files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →