Inventor · disambiguated record
Joost Jeroen Ottens
Also filed as: OTTENS JOOST J · OTTENS JOOST JEROEN
124 granted patents·7 pending applications·1,233 citations·filing 2002–2025
99Inventor score
Files withASML NETHERLANDS BV95KEMPER NICOLAAS RUDOLF5LOF JOERI5JACOBS JOHANNES HENRICUS WILHELMUS3OTTENS JOOST JEROEN3
Top patents by PatentIndex Score
131 records- 0199US11669021B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Jun 6, 2023·2 cites·20 claims
- 0299US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0399US7213963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 8, 2007·196 cites·28 claims
- 0498US7864292B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 4, 2011·57 cites·30 claims
- 0597US7978306B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Jul 12, 2011·28 cites·25 claims
- 0696US10761433B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Sep 1, 2020·3 cites·24 claims
- 0796US9140996B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 22, 2015·7 cites·20 claims
- 0896US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 0996US7804577B2Lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Sep 28, 2010·26 cites·44 claims
- 1096US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 1196US7602470B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 13, 2009·20 cites·21 claims
- 1295US9436096B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 6, 2016·5 cites·20 claims
- 1395US8786823B2Lithographic apparatus and device manufacturing methodLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Jul 22, 2014·7 cites·20 claims
- 1495US8743339B2Lithographic apparatus and device manufacturing methodZAAL KOEN JACOBUS JOHANNES MARIA·Filed 2009·Granted Jun 3, 2014·14 cites·20 claims
- 1595US7656501B2Lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·22 cites·31 claims
- 1695US7385670B2Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Jun 10, 2008·64 cites·33 claims
- 1795US7304715B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 4, 2007·52 cites·39 claims
- 1894US11385553B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2021·Granted Jul 12, 2022·2 cites·20 claims
- 1994US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 2094US11275316B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Mar 15, 2022·2 cites·21 claims
- 2194US9851644B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 26, 2017·3 cites·21 claims
- 2293US8027019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 27, 2011·15 cites·25 claims
- 2392US8564763B2Lithographic apparatus and methodJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2009·Granted Oct 22, 2013·32 cites·20 claims
- 2492US7751027B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·18 cites·65 claims
- 2591US8421996B2Lithographic apparatusLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2010·Granted Apr 16, 2013·7 cites·20 claims
- 2691US7420194B2Lithographic apparatus and substrate edge sealASML NETHERLANDS BV·Filed 2005·Granted Sep 2, 2008·10 cites·24 claims
- 2791US7411657B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 12, 2008·30 cites·41 claims
- 2891US7187433B2Electrostatic clamp assembly for a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Mar 6, 2007·18 cites·19 claims
- 2990US8570492B2Lithographic apparatusVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2012·Granted Oct 29, 2013·6 cites·20 claims
- 3090US8446563B2Lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted May 21, 2013·6 cites·24 claims
- 3189US10649346B2Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted May 12, 2020·2 cites·20 claims
- 3289US9696638B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jul 4, 2017·3 cites·18 claims
- 3389US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 3489US7110085B2Lithographic apparatus, substrate holder and method of manufacturingASML NETHERLANDS BV·Filed 2004·Granted Sep 19, 2006·36 cites·20 claims
- 3588US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 3688US8947631B2Lithographic apparatus and device manufacturing methodZAAL KOEN JACOBUS JOHANNES MARIA·Filed 2011·Granted Feb 3, 2015·3 cites·25 claims
- 3788US7092231B2Chuck, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Aug 15, 2006·41 cites·23 claims
- 3887US10222711B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Mar 5, 2019·1 cites·20 claims
- 3987US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 4087US8476167B2Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatusVAN MIERLO HUBERT ADRIAAN·Filed 2011·Granted Jul 2, 2013·14 cites·13 claims
- 4187US7791709B2Substrate support and lithographic processASML NETHERLANDS BV·Filed 2007·Granted Sep 7, 2010·11 cites·18 claims
- 4287US7227619B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 5, 2007·28 cites·24 claims
- 4386US12204255B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 4486US10996570B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2019·Granted May 4, 2021·2 cites·25 claims
- 4586US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 4686US10203612B2Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Feb 12, 2019·2 cites·20 claims
- 4785US7595496B2Optimized correction of wafer thermal deformations in a lithographic processASML NETHERLANDS BV·Filed 2007·Granted Sep 29, 2009·7 cites·15 claims
- 4884US12117721B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Oct 15, 2024·0 cites·20 claims
- 4984US9188882B2Lithographic apparatus and device manufacturing methodOTTENS JOOST JEROEN·Filed 2011·Granted Nov 17, 2015·3 cites·20 claims
- 5083US11281115B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2020·Granted Mar 22, 2022·1 cites·20 claims
Showing the top 50 of 131 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →