Inventor · disambiguated record
John Parks
Also filed as: PARKS JOHN · PARKS JOHN P
31 granted patents·4 pending applications·818 citations·filing 1998–2013
97Inventor score
Top patents by PatentIndex Score
35 records- 0198US6418874B1Toroidal plasma source for plasma processingAPPLIED MATERIALS INC·Filed 2000·Granted Jul 16, 2002·272 cites·19 claims
- 0295US6176198B1Apparatus and method for depositing low K dielectric materialsAPPLIED MATERIALS INC·Filed 1998·Granted Jan 23, 2001·298 cites·18 claims
- 0394US7191787B1Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluidLAM RES CORP·Filed 2003·Granted Mar 20, 2007·81 cites·17 claims
- 0490US6841006B2Atmospheric substrate processing apparatus for depositing multiple layers on a substrateAPPLIED MATERIALS INC·Filed 2001·Granted Jan 11, 2005·46 cites·11 claims
- 0585US7648584B2Method and apparatus for removing contamination from substrateLAM RES CORP·Filed 2006·Granted Jan 19, 2010·9 cites·27 claims
- 0681US6712020B2Toroidal plasma source for plasma processingAPPLIED MATERIALS INC·Filed 2002·Granted Mar 30, 2004·15 cites·9 claims
- 0780US7389783B2Proximity meniscus manifoldLAM RES CORP·Filed 2004·Granted Jun 24, 2008·24 cites·10 claims
- 0878US8522799B2Apparatus and system for cleaning a substrateFREER ERIK M·Filed 2006·Granted Sep 3, 2013·6 cites·8 claims
- 0977US7254900B2Wafer edge wheel with drying functionLAM RES CORP·Filed 2006·Granted Aug 14, 2007·5 cites·12 claims
- 1075US9117860B2Controlled ambient system for interface engineeringBOYD JOHN·Filed 2006·Granted Aug 25, 2015·5 cites·13 claims
- 1173US7758404B1Apparatus for cleaning edge of substrate and method for using the sameLAM RES CORP·Filed 2005·Granted Jul 20, 2010·6 cites·12 claims
- 1273US7591613B2Method and apparatus for transporting a substrate using non-newtonian fluidLAM RES CORP·Filed 2008·Granted Sep 22, 2009·3 cites·13 claims
- 1368US8555903B2Method and apparatus for removing contamination from substrateFREER ERIK M·Filed 2009·Granted Oct 15, 2013·2 cites·20 claims
- 1468US8314027B2Wafer electroless plating system and associated methodsTHIE WILLIAM·Filed 2011·Granted Nov 20, 2012·2 cites·15 claims
- 1568US7416370B2Method and apparatus for transporting a substrate using non-Newtonian fluidLAM RES CORP·Filed 2005·Granted Aug 26, 2008·2 cites·10 claims
- 1666US7350315B2Edge wheel dry manifoldLAM RES CORP·Filed 2003·Granted Apr 1, 2008·11 cites·21 claims
- 1763US7604011B2Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluidLAM RES CORP·Filed 2007·Granted Oct 20, 2009·1 cites·20 claims
- 1863US7406972B2Substrate proximity processing structuresLAM RES CORP·Filed 2007·Granted Aug 5, 2008·1 cites·15 claims
- 1962US7896974B2Chamber for wafer cleaning and method for making the sameLAM RES CORP·Filed 2008·Granted Mar 1, 2011·1 cites·14 claims
- 2061US8485120B2Method and apparatus for wafer electroless platingTHIE WILLIAM·Filed 2007·Granted Jul 16, 2013·1 cites·14 claims
- 2160US8328942B2Wafer heating and temperature control by backside fluid injectionMOORING BEN·Filed 2004·Granted Dec 11, 2012·7 cites·23 claims
- 2259US7392815B2Chamber for wafer cleaning and method for making the sameLAM RES CORP·Filed 2003·Granted Jul 1, 2008·6 cites·12 claims
- 2358US7089687B2Wafer edge wheel with drying functionLAM RES CORP·Filed 2004·Granted Aug 15, 2006·5 cites·12 claims
- 2457US8069813B2Wafer electroless plating system and associated methodsTHIE WILLIAM·Filed 2007·Granted Dec 6, 2011·1 cites·18 claims
- 2556US7293571B2Substrate proximity processing housing and insert for generating a fluid meniscusLAM RES CORP·Filed 2004·Granted Nov 13, 2007·4 cites·10 claims
- 2653US7566370B2Wafer clamping apparatus and method for operating the sameLAM RES CORP·Filed 2008·Granted Jul 28, 2009·0 cites·18 claims
- 2752US9287110B2Method and apparatus for wafer electroless platingLAM RES CORP·Filed 2013·Granted Mar 15, 2016·0 cites·20 claims
- 2852US7357115B2Wafer clamping apparatus and method for operating the sameLAM RES CORP·Filed 2003·Granted Apr 15, 2008·3 cites·16 claims
- 2949US8591665B2Wafer heating and temperature control by backside fluid injectionMOORING BEN·Filed 2012·Granted Nov 26, 2013·0 cites·17 claims
- 3046US7153388B2Chamber for high-pressure wafer processing and method for making the sameLAM RES CORP·Filed 2003·Granted Dec 26, 2006·1 cites·24 claims
- 3143US8844461B2Fluid handling system for wafer electroless plating and associated methodsTHIE WILLIAM·Filed 2007·Granted Sep 30, 2014·0 cites·23 claims
- 3243US2005098115A1Atmospheric substrate processing apparatus for depositing multiple layers on a substrateAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 3343US2015040947A1Method and Systems for Cleaning A SubstrateLAM RES CORP·Filed 2013·Application pending·0 cites
- 3443US2008057182A1Method for gap fill in controlled ambient systemBOYD JOHN·Filed 2006·Application pending·0 cites
- 3538US2011143553A1Integrated tool sets and process to keep substrate surface wet during plating and clean in fabrication of advanced nano-electronic devicesLAM RES CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →