Inventor · disambiguated record
John D. Pollock
Also filed as: FREISCHEL WILLIAM R · POLLOCK JOHN · POLLOCK JOHN D
23 granted patents·5 pending applications·982 citations·filing 1977–2016
96Inventor score
Files withAXCELIS TECH INC6ADVANCED ION BEAM TECH INC4POLLOCK JOHN D3NOVELLUS SYSTEMS INC2VEECO INSTR INC2
Top patents by PatentIndex Score
28 records- 0198US5984391AMicrofeature wafer handling apparatus and methodsNOVELLUS SYSTEMS INC·Filed 1997·Granted Nov 16, 1999·506 cites·17 claims
- 0296US7135691B2Reciprocating drive for scanning a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 14, 2006·36 cites·63 claims
- 0395US4726689ALinear gas bearing with integral vacuum seal for use in serial process ion implantation equipmentECLIPSE ION TECHNOLOGY INC·Filed 1986·Granted Feb 23, 1988·104 cites·10 claims
- 0489US7323695B2Reciprocating drive for scanning a workpieceAXCELIS TECH INC·Filed 2005·Granted Jan 29, 2008·11 cites·25 claims
- 0589US7141809B2Method for reciprocating a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 28, 2006·12 cites·20 claims
- 0686US5996528AMethod and apparatus for flowing gases into a manifold at high potentialNOVELLUS SYSTEMS INC·Filed 1996·Granted Dec 7, 1999·72 cites·5 claims
- 0785US6428262B1Compact load lock system for ion beam processing of foupsPROTEROS LLC·Filed 2000·Granted Aug 6, 2002·37 cites·27 claims
- 0883US6806479B1Apparatus and method for reducing implant angle variations across a large wafer for a batch diskADVANCED ION BEAM TECHNOLOGY I·Filed 2003·Granted Oct 19, 2004·18 cites·32 claims
- 0983US6777687B2Substrate positioning systemAXCELIS TECH INC·Filed 2002·Granted Aug 17, 2004·23 cites·27 claims
- 1082US7381977B2Ion beam profilerAXCELIS TECH INC·Filed 2005·Granted Jun 3, 2008·6 cites·25 claims
- 1181US4680474AMethod and apparatus for improved ion dose accuracyVARIAN ASSOCIATES·Filed 1985·Granted Jul 14, 1987·26 cites·8 claims
- 1277US9057129B2Implant method and implanter by using a variable apertureADVANCED ION BEAM TECH INC·Filed 2014·Granted Jun 16, 2015·3 cites·19 claims
- 1377US5421889AMethod and apparatus for inverting samples in a processTOKYO ELECTRON LTD·Filed 1993·Granted Jun 6, 1995·69 cites·24 claims
- 1472US6765219B2Hybrid scanning system and methods for ion implantationVARIAH SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jul 20, 2004·12 cites·7 claims
- 1566US6082297AEncapsulated thermofoil heater apparatus and associated methodsNOVELLUS SYTEMS INC·Filed 1997·Granted Jul 4, 2000·35 cites·38 claims
- 1651US2011049383A1Ion implanter and ion implant method thereofADVANCED ION BEAM TECH INC·Filed 2009·Application pending·0 cites
- 1749US10718052B2Rotating disk reactor with ferrofluid seal for chemical vapor depositionVEECO INSTR INC·Filed 2016·Granted Jul 21, 2020·0 cites·21 claims
- 1849US6921907B2Substrate positioning systemAXCELIS TECH INC·Filed 2004·Granted Jul 26, 2005·1 cites·16 claims
- 1949US4172804AMethod of preparing fire retardant insulationCHRISTIANSON GEORGE·Filed 1977·Granted Oct 30, 1979·11 cites·12 claims
- 2049US2015075431A1Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor DepositionVEECO INSTR INC·Filed 2013·Application pending·0 cites
- 2147US2010181501A1Apparatus for sub-zero degree c ion implantationPOLLOCK JOHN D·Filed 2009·Application pending·0 cites
- 2245US8987691B2Ion implanter and ion implant method thereofADVANCED ION BEAM TECH INC·Filed 2013·Granted Mar 24, 2015·0 cites·27 claims
- 2344US8304330B2Method for low temperature ion implantationPOLLOCK JOHN D·Filed 2012·Granted Nov 6, 2012·0 cites·6 claims
- 2441US8124508B2Method for low temperature ion implantationPOLLOCK JOHN D·Filed 2010·Granted Feb 28, 2012·0 cites·13 claims
- 2541US2014133950A1Insertion/Extraction Tool For Components In HousingPOLLOCK JOHN·Filed 2012·Application pending·0 cites
- 2641US2002125446A1Substrate positioning systemFiled 2002·Application pending·0 cites
- 2739US8669539B2Implant method and implanter by using a variable apertureWAN ZHIMIN·Filed 2010·Granted Mar 11, 2014·0 cites·19 claims
- 2839US8039374B2Method for low temperature ion implantationADVANCED ION BEAM TECH INC·Filed 2010·Granted Oct 18, 2011·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →