Inventor · disambiguated record
Josephus Jacobus Smits
Also filed as: SMITS JOSEPHUS JACOBUS
9 granted patents·52 citations·filing 2002–2012
86Inventor score
Top patents by PatentIndex Score
9 records- 0187US7372058B2Ex-situ removal of deposition on an optical elementASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·8 cites·10 claims
- 0284US7612353B2Lithographic apparatus, contaminant trap, and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Nov 3, 2009·8 cites·19 claims
- 0381US7397056B2Lithographic apparatus, contaminant trap, and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 8, 2008·7 cites·75 claims
- 0475US6750949B2Lithographic apparatus and device manufacturing methodAMSL NETHERLANDS BV·Filed 2002·Granted Jun 15, 2004·19 cites·28 claims
- 0571US7767989B2Ex-situ removal of deposition on an optical elementASML NETHERLANDS BV·Filed 2006·Granted Aug 3, 2010·1 cites·29 claims
- 0666US7116399B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·8 cites·16 claims
- 0760US8598550B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2012·Granted Dec 3, 2013·0 cites·27 claims
- 0857US8289498B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 16, 2012·1 cites·8 claims
- 0956US8134136B2Ex-situ removal of deposition on an optical elementBANINE VADIM YEVGENYEVICH·Filed 2010·Granted Mar 13, 2012·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →