Inventor · disambiguated record
Juwen Gao
Also filed as: GAO JUWEN
33 granted patents·11 pending applications·1,299 citations·filing 2003–2024
98Inventor score
Top patents by PatentIndex Score
44 records- 0198US10103058B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2017·Granted Oct 16, 2018·23 cites·13 claims
- 0298US9653353B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2013·Granted May 16, 2017·50 cites·16 claims
- 0398US9240347B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2014·Granted Jan 19, 2016·72 cites·20 claims
- 0498US7691749B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 6, 2010·97 cites·18 claims
- 0598US7655567B1Methods for improving uniformity and resistivity of thin tungsten filmsNOVELLUS SYSTEMS INC·Filed 2007·Granted Feb 2, 2010·91 cites·14 claims
- 0697US11901227B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2021·Granted Feb 13, 2024·3 cites·18 claims
- 0797US9997405B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2015·Granted Jun 12, 2018·22 cites·19 claims
- 0897US9595470B2Methods of preparing tungsten and tungsten nitride thin films using tungsten chloride precursorLAM RES CORP·Filed 2015·Granted Mar 14, 2017·27 cites·14 claims
- 0997US9362163B2Methods and apparatuses for atomic layer cleaning of contacts and viasLAM RES CORP·Filed 2014·Granted Jun 7, 2016·109 cites·17 claims
- 1097US8975184B2Methods of improving tungsten contact resistance in small critical dimension featuresCHEN FENG·Filed 2012·Granted Mar 10, 2015·38 cites·19 claims
- 1197US7754604B2Reducing silicon attack and improving resistivity of tungsten nitride filmNOVELLUS SYSTEMS INC·Filed 2006·Granted Jul 13, 2010·56 cites·20 claims
- 1297US7141494B2Method for reducing tungsten film roughness and improving step coverageNOVELLUS SYSTEMS INC·Filed 2003·Granted Nov 28, 2006·147 cites·32 claims
- 1397US7005372B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2003·Granted Feb 28, 2006·187 cites·46 claims
- 1496US11075115B2Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2018·Granted Jul 27, 2021·11 cites·22 claims
- 1596US10580695B2Feature fill with nucleation inhibitionLAM RES CORP·Filed 2018·Granted Mar 3, 2020·13 cites·13 claims
- 1696US10256142B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2013·Granted Apr 9, 2019·25 cites·23 claims
- 1796US9953984B2Tungsten for wordline applicationsLAM RES CORP·Filed 2016·Granted Apr 24, 2018·12 cites·20 claims
- 1896US8101521B1Methods for improving uniformity and resistivity of thin tungsten filmsGAO JUWEN·Filed 2009·Granted Jan 24, 2012·61 cites·20 claims
- 1995US9034760B2Methods of forming tensile tungsten films and compressive tungsten filmsNOVELLUS SYSTEMS INC·Filed 2013·Granted May 19, 2015·25 cites·21 claims
- 2095US8709948B2Tungsten barrier and seed for copper filled TSVDANEK MICHAL·Filed 2010·Granted Apr 29, 2014·36 cites·25 claims
- 2195US8207062B2Method for improving adhesion of low resistivity tungsten/tungsten nitride layersGAO JUWEN·Filed 2009·Granted Jun 26, 2012·46 cites·15 claims
- 2295US7262125B2Method of forming low-resistivity tungsten interconnectsNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 28, 2007·91 cites·32 claims
- 2392US8617982B2Subtractive patterning to define circuit componentsDANEK MICHAL·Filed 2011·Granted Dec 31, 2013·15 cites·17 claims
- 2491US11348795B2Metal fill process for three-dimensional vertical NAND wordlineLAM RES CORP·Filed 2018·Granted May 31, 2022·7 cites·20 claims
- 2591US9969622B2Ternary tungsten boride nitride films and methods for forming sameLAM RES CORP·Filed 2013·Granted May 15, 2018·12 cites·15 claims
- 2690US11410883B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2019·Granted Aug 9, 2022·5 cites·19 claims
- 2787US8778797B2Systems and methods for selective tungsten deposition in viasGAO JUWEN·Filed 2011·Granted Jul 15, 2014·11 cites·18 claims
- 2884US11670516B2Metal-containing passivation for high aspect ratio etchLAM RES CORP·Filed 2019·Granted Jun 6, 2023·3 cites·20 claims
- 2977US12014928B2Multi-layer feature fillLAM RES CORP·Filed 2019·Granted Jun 18, 2024·2 cites·17 claims
- 3075US10529722B2Tungsten for wordline applicationsLAM RES CORP·Filed 2018·Granted Jan 7, 2020·1 cites·19 claims
- 3174US2021327754A1Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2021·Application pending·0 cites
- 3273US11972952B2Atomic layer deposition on 3D NAND structuresLAM RES CORP·Filed 2019·Granted Apr 30, 2024·1 cites·16 claims
- 3372US2024282580A1Multi-layer feature fillLAM RES CORP·Filed 2024·Application pending·0 cites
- 3471US2024266177A1Atomic layer deposition on 3d nand structuresLAM RES CORP·Filed 2024·Application pending·0 cites
- 3566US2020185273A1Feature fill with nucleation inhibitionLAM RES CORP·Filed 2020·Application pending·0 cites
- 3664US12444651B2Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2022·Granted Oct 14, 2025·0 cites·7 claims
- 3764US2025149383A1Tungsten feature fill with nucleation inhibitionNOVELLUS SYSTEMS INC·Filed 2024·Application pending·0 cites
- 3855US2025391658A1Integrated high aspect ratio etchingLAM RES CORP·Filed 2023·Application pending·0 cites
- 3955US2025022751A1Gradient liner in metal fillLAM RES CORP·Filed 2022·Application pending·0 cites
- 4055US2016190008A1Tungsten feature fillNOVELLUS SYSTEMS INC·Filed 2015·Application pending·0 cites
- 4150US2025051908A1Large grain tungsten growth in featuresLAM RES CORP·Filed 2022·Application pending·0 cites
- 4246US12060639B2Rapid flush purging during atomic layer depositionLAM RES CORP·Filed 2020·Granted Aug 13, 2024·0 cites·20 claims
- 4346US2023290639A1Low resistance gate oxide metallization linerLAM RES CORP·Filed 2020·Application pending·0 cites
- 4446US2024006180A1Low resistance pulsed cvd tungstenLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →