Inventor · disambiguated record
Junichi Kitano
Also filed as: KITANO JUNICHI
50 granted patents·12 pending applications·1,153 citations·filing 1994–2022
98Inventor score
Files withTOKYO ELECTRON LTD42KITANO JUNICHI6ASAHI GROUP HOLDINGS LTD5KYOUDA HIDEHARU3TOKAI RYOKAKU TETSUDO KK2
Top patents by PatentIndex Score
62 records- 0198US6620251B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Sep 16, 2003·500 cites·7 claims
- 0294US8366872B2Substrate treatment method, coating film removing apparatus, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2011·Granted Feb 5, 2013·16 cites·7 claims
- 0391US6518199B2Method and system for coating and developingTOKYO ELECTRON LTD·Filed 2001·Granted Feb 11, 2003·31 cites·8 claims
- 0489US7926441B2Substrate treatment method, coating treatment apparatus, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2008·Granted Apr 19, 2011·13 cites·7 claims
- 0588US6585430B2System and method for coating and developingTOKYO ELECTRON LTD·Filed 2001·Granted Jul 1, 2003·42 cites·17 claims
- 0686US5876280ASubstrate treating system and substrate treating methodTOKYO ELECTRON LTD·Filed 1997·Granted Mar 2, 1999·91 cites·26 claims
- 0783US7401988B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2007·Granted Jul 22, 2008·7 cites·15 claims
- 0882US7959988B2Coating film forming apparatus and methodTOKYO ELECTRON LTD·Filed 2007·Granted Jun 14, 2011·8 cites·12 claims
- 0981US6955485B2Developing method and developing unitTOKYO ELECTRON LTD·Filed 2003·Granted Oct 18, 2005·17 cites·7 claims
- 1079US5434644AFilter deviceTOKYO ELECTRON LTD·Filed 1994·Granted Jul 18, 1995·43 cites·20 claims
- 1178US6633022B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Oct 14, 2003·21 cites·20 claims
- 1277US6632281B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Oct 14, 2003·15 cites·17 claims
- 1377US5944894ASubstrate treatment systemTOKYO ELECTRON LTD·Filed 1997·Granted Aug 31, 1999·54 cites·19 claims
- 1476US7977039B2Rinse treatment method, developing treatment method and developing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 12, 2011·6 cites·3 claims
- 1576US6467976B2Coating and developing systemTOKYO ELECTRON LTD·Filed 2001·Granted Oct 22, 2002·18 cites·10 claims
- 1675US11718515B2Liquid sale management deviceASAHI GROUP HOLDINGS LTD·Filed 2018·Granted Aug 8, 2023·3 cites·8 claims
- 1775US6617095B2Evaluating method of hydrophobic process, forming method of resist pattern, and forming system of resist patternTOKYO ELECTRON LTD·Filed 2001·Granted Sep 9, 2003·21 cites·18 claims
- 1874US10026629B2Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing programTOKYO ELECTRON LTD·Filed 2015·Granted Jul 17, 2018·2 cites·5 claims
- 1974US6063439AProcessing apparatus and method using solutionTOKYO ELECTRON LTD·Filed 1998·Granted May 16, 2000·45 cites·17 claims
- 2074US5928390AVertical processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Jul 27, 1999·45 cites·49 claims
- 2173US6875466B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Apr 5, 2005·14 cites·8 claims
- 2273US6485203B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Nov 26, 2002·17 cites·16 claims
- 2372US8733592B2Liquid delivery system, liquid-delivery switching device, and liquid-flowpath regulating deviceKITANO JUNICHI·Filed 2010·Granted May 27, 2014·5 cites·11 claims
- 2471US6875281B2Method and system for coating and developingTOKYO ELECTRON LTD·Filed 2001·Granted Apr 5, 2005·12 cites·9 claims
- 2570US11430675B2Substrate processing apparatus and processing liquid reuse methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 30, 2022·1 cites·13 claims
- 2670US6333003B1Treatment apparatus, treatment method, and impurity removing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Dec 25, 2001·39 cites·6 claims
- 2769US8053180B2Developing method and developing unitTOKYO ELECTRON LTD·Filed 2009·Granted Nov 8, 2011·1 cites·5 claims
- 2868US7924396B2Coating/developing apparatus and pattern forming methodTOKYO ELECTRON LTD·Filed 2007·Granted Apr 12, 2011·3 cites·20 claims
- 2966US6884298B2Method and system for coating and developingTOKYO ELECTRON LTD·Filed 2002·Granted Apr 26, 2005·6 cites·5 claims
- 3065US11332357B2Liquid quality control deviceASAHI GROUP HOLDINGS LTD·Filed 2018·Granted May 17, 2022·1 cites·8 claims
- 3163US7208066B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2003·Granted Apr 24, 2007·7 cites·9 claims
- 3262USD732326SBeer dispenserKITANO JUNICHI·Filed 2013·Granted Jun 23, 2015·11 cites·1 claims
- 3362US8111372B2Coating film forming apparatus and coating film forming method for immersion light exposureKYOUDA HIDEHARU·Filed 2007·Granted Feb 7, 2012·2 cites·11 claims
- 3460US9103451B2Device for stopping flow of fluidKITANO JUNICHI·Filed 2008·Granted Aug 11, 2015·2 cites·11 claims
- 3559US7486377B2Developing method and developing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Feb 3, 2009·5 cites·5 claims
- 3658US7857530B2Developing method and developing unitTOKYO ELECTRON LTD·Filed 2008·Granted Dec 28, 2010·0 cites·4 claims
- 3757US11498825B2Liquid quality managing device and methodASAHI GROUP HOLDINGS LTD·Filed 2018·Granted Nov 15, 2022·1 cites·6 claims
- 3857US7427168B2Developing method and developing unitTOKYO ELECTRON LTD·Filed 2007·Granted Sep 23, 2008·0 cites·6 claims
- 3953US9272894B2Liquid delivery system and liquid-flowpath regulating deviceASAHI BREWERIES LTD·Filed 2014·Granted Mar 1, 2016·0 cites·13 claims
- 4053US8054443B2Developing method and developing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Nov 8, 2011·0 cites·10 claims
- 4153US6518718B2Speed electromotive force phase control system adapted to low speedTOKAI RYOKAKU TETSUDO KK·Filed 2001·Granted Feb 11, 2003·16 cites·4 claims
- 4253US2008176002A1Substrate treatment method, coating film removing apparatus, and substrate treatment systemTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 4351US8083959B2Substrate processing method, substrate processing system, and computer-readable storage mediumKYOUDA HIDEHARU·Filed 2007·Granted Dec 27, 2011·0 cites·8 claims
- 4451US2005266359A1Developing method and developing unitTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 4550US2022152780A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 4648US8703400B2Substrate treatment method, coating treatment apparatus, and substrate treatment systemTSUTSUMI KENJI·Filed 2011·Granted Apr 22, 2014·0 cites·5 claims
- 4748US6620248B2Coating apparatus and mixing apparatusTOYKO ELECTRON LTD·Filed 2001·Granted Sep 16, 2003·2 cites·11 claims
- 4848US2025149355A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 4946US2005130445A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 5045US2012061021A1Substrate processing method, substrate processing system, and computer-readable storage mediumKYOUDA HIDEHARU·Filed 2011·Application pending·0 cites
Showing the top 50 of 62 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →