Inventor · disambiguated record
Jun Qian
Also filed as: QIAN JUN · QIAN JUN-LIN
123 granted patents·57 pending applications·2,802 citations·filing 1997–2025
99Inventor score
Top patents by PatentIndex Score
180 records- 0199US9997357B2Capped ALD films for doping fin-shaped channel regions of 3-D IC transistorsLAM RES CORP·Filed 2014·Granted Jun 12, 2018·430 cites·22 claims
- 0299US9745658B2Chamber undercoat preparation method for low temperature ALD filmsLAM RES CORP·Filed 2013·Granted Aug 29, 2017·375 cites·16 claims
- 0398US9966299B2Inhibitor plasma mediated atomic layer deposition for seamless feature fillLAM RES CORP·Filed 2016·Granted May 8, 2018·365 cites·19 claims
- 0498US9793110B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2016·Granted Oct 17, 2017·25 cites·16 claims
- 0598US9425078B2Inhibitor plasma mediated atomic layer deposition for seamless feature fillLAM RES CORP·Filed 2015·Granted Aug 23, 2016·454 cites·22 claims
- 0698US9257274B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2013·Granted Feb 9, 2016·523 cites·23 claims
- 0797US10679848B2Selective atomic layer deposition with post-dose treatmentLAM RES CORP·Filed 2018·Granted Jun 9, 2020·10 cites·13 claims
- 0897US10559468B2Capped ALD films for doping fin-shaped channel regions of 3-D IC transistorsLAM RES CORP·Filed 2018·Granted Feb 11, 2020·13 cites·21 claims
- 0997US10361076B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2017·Granted Jul 23, 2019·17 cites·4 claims
- 1097US10037884B2Selective atomic layer deposition for gapfill using sacrificial underlayerLAM RES CORP·Filed 2016·Granted Jul 31, 2018·30 cites·20 claims
- 1196US11780047B2Determination of substrate layer thickness with polishing pad wear compensationAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·4 cites·14 claims
- 1296US10665429B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2017·Granted May 26, 2020·6 cites·20 claims
- 1396US10062563B2Selective atomic layer deposition with post-dose treatmentLAM RES CORP·Filed 2016·Granted Aug 28, 2018·16 cites·18 claims
- 1496US9793096B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2015·Granted Oct 17, 2017·16 cites·18 claims
- 1595US12354871B2Ultrathin atomic layer deposition film accuracy thickness controlLAM RES CORP·Filed 2023·Granted Jul 8, 2025·1 cites·17 claims
- 1695US11847776B2System using film thickness estimation from machine learning based processing of substrate imagesAPPLIED MATERIALS INC·Filed 2021·Granted Dec 19, 2023·4 cites·18 claims
- 1795US10566187B2Ultrathin atomic layer deposition film accuracy thickness controlLAM RES CORP·Filed 2015·Granted Feb 18, 2020·9 cites·19 claims
- 1895US10526701B2Multi-cycle ALD process for film uniformity and thickness profile modulationLAM RES CORP·Filed 2015·Granted Jan 7, 2020·6 cites·9 claims
- 1995US9138860B2Closed-loop control for improved polishing pad profilesDHANDAPANI SIVAKUMAR·Filed 2011·Granted Sep 22, 2015·23 cites·20 claims
- 2094US11133180B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2019·Granted Sep 28, 2021·6 cites·14 claims
- 2194US9870917B2Variable temperature hardware and methods for reduction of wafer backside depositionLAM RES CORP·Filed 2016·Granted Jan 16, 2018·10 cites·11 claims
- 2293US11524382B2Polishing apparatus using machine learning and compensation for pad thicknessAPPLIED MATERIALS INC·Filed 2019·Granted Dec 13, 2022·8 cites·21 claims
- 2393US9362186B2Polishing with eddy current feed meaurement prior to deposition of conductive layerAPPLIED MATERIALS INC·Filed 2015·Granted Jun 7, 2016·10 cites·8 claims
- 2493US8190285B2Feedback for polishing rate correction in chemical mechanical polishingQIAN JUN·Filed 2010·Granted May 29, 2012·10 cites·20 claims
- 2592US11836913B2Film thickness estimation from machine learning based processing of substrate imagesAPPLIED MATERIALS INC·Filed 2021·Granted Dec 5, 2023·2 cites·20 claims
- 2692US10094018B2Dynamic precursor dosing for atomic layer depositionLAM RES CORP·Filed 2015·Granted Oct 9, 2018·7 cites·17 claims
- 2792US9797042B2Single ALD cycle thickness control in multi-station substrate deposition systemsLAM RES CORP·Filed 2014·Granted Oct 24, 2017·11 cites·12 claims
- 2892US8992286B2Weighted regression of thickness maps from spectral dataAPPLIED MATERIALS INC·Filed 2013·Granted Mar 31, 2015·9 cites·20 claims
- 2991US10577691B2Single ALD cycle thickness control in multi-station substrate deposition systemsLAM RES CORP·Filed 2017·Granted Mar 3, 2020·6 cites·17 claims
- 3091US10407773B2Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD systemLAM RES CORP·Filed 2017·Granted Sep 10, 2019·6 cites·17 claims
- 3191US9617638B2Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD systemLAM RES CORP·Filed 2014·Granted Apr 11, 2017·9 cites·24 claims
- 3291US7952708B2High throughput measurement systemAPPLIED MATERIALS INC·Filed 2008·Granted May 31, 2011·13 cites·21 claims
- 3390US12261038B2Gapfill of variable aspect ratio features with a composite PEALD and PECVD methodLAM RES CORP·Filed 2021·Granted Mar 25, 2025·1 cites·20 claims
- 3490US11101129B2Ultrathin atomic layer deposition film accuracy thickness controlLAM RES CORP·Filed 2019·Granted Aug 24, 2021·3 cites·11 claims
- 3590US9579767B2Automatic generation of reference spectra for optical monitoring of substratesQIAN JUN·Filed 2011·Granted Feb 28, 2017·8 cites·15 claims
- 3690US7840375B2Methods and apparatus for generating a library of spectraAPPLIED MATERIALS INC·Filed 2008·Granted Nov 23, 2010·12 cites·23 claims
- 3790US7444198B2Determining physical property of substrateAPPLIED MATERIALS INC·Filed 2006·Granted Oct 28, 2008·17 cites·15 claims
- 3889US11970772B2Dynamic precursor dosing for atomic layer depositionLAM RES CORP·Filed 2021·Granted Apr 30, 2024·1 cites·10 claims
- 3989US11646198B2Ultrathin atomic layer deposition film accuracy thickness controlLAM RES CORP·Filed 2021·Granted May 9, 2023·1 cites·8 claims
- 4089US10757248B1Identifying location of mobile phones in a vehicleIBM·Filed 2019·Granted Aug 25, 2020·11 cites·14 claims
- 4189US9242337B2Dynamic residue clearing control with in-situ profile control (ISPC)APPLIED MATERIALS INC·Filed 2014·Granted Jan 26, 2016·8 cites·20 claims
- 4288US12403561B2Eddy current monitoring to detect vibration in polishingAPPLIED MATERIALS INC·Filed 2022·Granted Sep 2, 2025·1 cites·5 claims
- 4388US11989964B2Techniques for graph data structure augmentationORACLE INT CORP·Filed 2021·Granted May 21, 2024·2 cites·20 claims
- 4487US11658078B2Using a trained neural network for use in in-situ monitoring during polishing and polishing systemAPPLIED MATERIALS INC·Filed 2021·Granted May 23, 2023·1 cites·17 claims
- 4587US11577356B2Machine vision as input to a CMP process control algorithmAPPLIED MATERIALS INC·Filed 2019·Granted Feb 14, 2023·3 cites·19 claims
- 4686US12077859B2Variable cycle and time RF activation method for film thickness matching in a multi-station deposition systemLAM RES CORP·Filed 2022·Granted Sep 3, 2024·1 cites·26 claims
- 4785US11180850B2Dynamic precursor dosing for atomic layer depositionLAM RES CORP·Filed 2018·Granted Nov 23, 2021·3 cites·4 claims
- 4885US11011379B2Capped ALD films for doping fin-shaped channel regions of 3-D IC transistorsLAM RES CORP·Filed 2019·Granted May 18, 2021·2 cites·12 claims
- 4984US12479062B2Determining substrate orientation with acoustic signalsAPPLIED MATERIALS INC·Filed 2022·Granted Nov 25, 2025·0 cites·20 claims
- 5084US12374139B2Generating synthetic training data including document images with key-value pairsORACLE INT CORP·Filed 2022·Granted Jul 29, 2025·1 cites·20 claims
Showing the top 50 of 180 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Jun Qian files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →