Inventor · disambiguated record
Jun Sonobe
Also filed as: SONOBE JUN
7 granted patents·8 pending applications·12 citations·filing 2001–2020
77Inventor score
Top patents by PatentIndex Score
15 records- 0172US9012331B2Etching method and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Apr 21, 2015·3 cites·13 claims
- 0267US8679259B2Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vesselKAMEDA KENJI·Filed 2011·Granted Mar 25, 2014·2 cites·8 claims
- 0366US9540727B2Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Jan 10, 2017·2 cites·14 claims
- 0464US8119853B2Low pressure acetylene storageHUANG SHIH-WEN·Filed 2009·Granted Feb 21, 2012·4 cites·16 claims
- 0562US9683288B2Method of manufacturing semiconductor device and method of cleaning processing vesselHITACHI INT ELECTRIC INC·Filed 2014·Granted Jun 20, 2017·1 cites·10 claims
- 0655US2013220377A1Method of cleaning a film-forming apparatusAIR LIQUIDE US·Filed 2013·Application pending·0 cites
- 0752US11920732B2Use of stable isotopes of CO2 to validate cylinder preparationAIRGAS INC·Filed 2020·Granted Mar 5, 2024·0 cites·14 claims
- 0848US7942974B2Method of cleaning a film-forming apparatusTOSHIBA KK·Filed 2005·Granted May 17, 2011·0 cites·17 claims
- 0948US2008236483A1Method for low temperature thermal cleaningSONOBE JUN·Filed 2008·Application pending·0 cites
- 1043US2011000508A1Method of removing residual fluorine from deposition chamberAIR LIQUIDE·Filed 2010·Application pending·0 cites
- 1143US2005082002A1Method of cleaning a film-forming apparatus and film-forming apparatusFiled 2004·Application pending·0 cites
- 1243US2010012153A1Method of cleaning film forming apparatus and film forming apparatusSHIGEMOTO TAKAMITSU·Filed 2007·Application pending·0 cites
- 1341US2005161321A1Apparatus for the generation and supply of fluorine gasFiled 2002·Application pending·0 cites
- 1438US2008236482A1Method for low temperature thermal cleaningSONOBE JUN·Filed 2007·Application pending·0 cites
- 1533US2005020071A1Method and apparatus for cleaning and method and apparatus for etchingFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →