Inventor · disambiguated record
Jun Yashima
Also filed as: YASHIMA JUN
30 granted patents·140 citations·filing 2006–2019
96Inventor score
Top patents by PatentIndex Score
30 records- 0193US7601968B2Charged particle beam writing method and apparatusNUFLARE TECHNOLOGY INC·Filed 2006·Granted Oct 13, 2009·19 cites·15 claims
- 0291US8563953B2Charged particle beam writing apparatus and charged particle beam writing methodNAKAYAMADA NORIAKI·Filed 2011·Granted Oct 22, 2013·10 cites·10 claims
- 0391US7740991B2Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beamNUFLARE TECHNOLOGY INC·Filed 2006·Granted Jun 22, 2010·19 cites·18 claims
- 0490US8352889B2Beam dose computing method and writing method and record carrier body and writing apparatusNUFLARE TECHNOLOGY INC·Filed 2011·Granted Jan 8, 2013·5 cites·5 claims
- 0590US8065635B2Method for resizing pattern to be written by lithography technique, and charged particle beam writing methodYASHIMA JUN·Filed 2007·Granted Nov 22, 2011·10 cites·4 claims
- 0688US8552405B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2012·Granted Oct 8, 2013·8 cites·15 claims
- 0788US8122390B2Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of patternYASHIMA JUN·Filed 2009·Granted Feb 21, 2012·10 cites·10 claims
- 0886US8309283B2Method and apparatus for writingKATO YASUO·Filed 2009·Granted Nov 13, 2012·13 cites·9 claims
- 0983US8183545B2Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writingYASHIMA JUN·Filed 2010·Granted May 22, 2012·5 cites·12 claims
- 1081US9548183B2Charged particle beam writing apparatus, and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Jan 17, 2017·4 cites·13 claims
- 1181US8563952B2Charged particle beam writing apparatusYASHIMA JUN·Filed 2012·Granted Oct 22, 2013·5 cites·18 claims
- 1279US8429575B2Method for resizing pattern to be written by lithography technique, and charged particle beam writing methodYASHIMA JUN·Filed 2011·Granted Apr 23, 2013·3 cites·2 claims
- 1377US8103980B2Beam dose computing method and writing method and record carrier body and writing apparatusEMI KEIKO·Filed 2009·Granted Jan 24, 2012·8 cites·6 claims
- 1476US9153420B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Oct 6, 2015·3 cites·11 claims
- 1576US8669537B2Charged particle beam writing apparatus and methodYASHIMA JUN·Filed 2009·Granted Mar 11, 2014·4 cites·6 claims
- 1674US10937629B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Mar 2, 2021·1 cites·12 claims
- 1774US8188449B2Charged particle beam drawing method and apparatusSHIBATA HAYATO·Filed 2010·Granted May 29, 2012·4 cites·10 claims
- 1872US8466440B2Charged particle beam drawing apparatus and control method thereofYASHIMA JUN·Filed 2011·Granted Jun 18, 2013·2 cites·4 claims
- 1969US8878149B2Charged particle beam writing apparatus and charged particle beam writing methodYASHIMA JUN·Filed 2011·Granted Nov 4, 2014·2 cites·10 claims
- 2068US9934935B2Multi charged particle beam writing apparatus and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Apr 3, 2018·1 cites·10 claims
- 2167US9141750B2Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writingNUFLARE TECHNOLOGY INC·Filed 2013·Granted Sep 22, 2015·2 cites·20 claims
- 2267US8872141B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 28, 2014·1 cites·14 claims
- 2367US8527913B2Method for resizing pattern to be written by lithography technique, and charged particle beam writing methodYASHIMA JUN·Filed 2012·Granted Sep 3, 2013·1 cites·10 claims
- 2455USRE47707ECharged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Nov 5, 2019·0 cites·21 claims
- 2547US9564293B2Charged particle beam writing apparatus, and buffer memory data storage methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Feb 7, 2017·0 cites·12 claims
- 2644US9659747B2Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted May 23, 2017·0 cites·15 claims
- 2743US9006691B2Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing blockYASHIMA JUN·Filed 2012·Granted Apr 14, 2015·0 cites·19 claims
- 2842US9188853B2Charged particle beam drawing apparatus and control method thereofYASHIMA JUN·Filed 2011·Granted Nov 17, 2015·0 cites·10 claims
- 2942US8796650B2Charged particle beam drawing method and apparatusYASHIMA JUN·Filed 2010·Granted Aug 5, 2014·0 cites·10 claims
- 3039US9875876B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jan 23, 2018·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →