Inventor · disambiguated record
Kaushik Alayavalli
Also filed as: ALAYAVALLI KAUSHIK · ALAYAVALLI KAUSHIK COMANDOOR
15 granted patents·18 pending applications·19 citations·filing 2016–2024
87Inventor score
Files withAPPLIED MATERIALS INC33
Top patents by PatentIndex Score
33 records- 0191US10889894B2Faceplate with embedded heaterAPPLIED MATERIALS INC·Filed 2019·Granted Jan 12, 2021·7 cites·20 claims
- 0291US10276353B2Dual-channel showerhead for formation of film stacksAPPLIED MATERIALS INC·Filed 2016·Granted Apr 30, 2019·4 cites·20 claims
- 0390US11721545B2Method of using dual frequency RF power in a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Aug 8, 2023·2 cites·16 claims
- 0487US10600624B2System and method for substrate processing chambersAPPLIED MATERIALS INC·Filed 2018·Granted Mar 24, 2020·5 cites·22 claims
- 0585US11959174B2Shunt door for magnets in plasma process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Apr 16, 2024·1 cites·20 claims
- 0677US12106958B2Method of using dual frequency RF power in a process chamberAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·0 cites·20 claims
- 0776US2024271284A1Shunt door for magnets in plasma process chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0865US2022319841A1Deposition of low-stress carbon-containing layersAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0964US11404263B2Deposition of low-stress carbon-containing layersAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·0 cites·17 claims
- 1063US12460298B2Showerhead design to control stray depositionAPPLIED MATERIALS INC·Filed 2021·Granted Nov 4, 2025·0 cites·18 claims
- 1163US2025279265A1Small cell reactors with shared foreline and pressure conduitAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1261US2025038021A1High Throughput Substrate Processing Cluster Tool With Factory Interface CenteringAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1360US10907252B2Horizontal heat choke faceplate designAPPLIED MATERIALS INC·Filed 2018·Granted Feb 2, 2021·0 cites·19 claims
- 1460US2025308976A1Lift pin systems and methodsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1559US2025308973A1Lift pin systems and methodsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1659US2025136386A1High throughput substrate processing cluster toolAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1756US12142468B2Stress treatments for cover wafersAPPLIED MATERIALS INC·Filed 2021·Granted Nov 12, 2024·0 cites·19 claims
- 1854US11984302B2Magnetic-material shield around plasma chambers near pedestalAPPLIED MATERIALS INC·Filed 2020·Granted May 14, 2024·0 cites·16 claims
- 1954US11495454B2Deposition of low-stress boron-containing layersAPPLIED MATERIALS INC·Filed 2020·Granted Nov 8, 2022·0 cites·20 claims
- 2054US2023377855A1Lower deposition chamber ccp electrode cleaning solutionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2154US2025308862A1Leveling systems and methodsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2253US12068153B2Situ clean for bevel and edge ringAPPLIED MATERIALS INC·Filed 2022·Granted Aug 20, 2024·0 cites·8 claims
- 2353US2025033156A1Swapper for a cluster toolAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2453US2024290644A1Two level vacuum wafer transfer system with robots on each levelAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2552US2019226089A1High temperature faceplate with hybrid material designAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2652US2019226088A1High temperature faceplate with thermal choke and coolingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2751US2025308975A1Lift pin systems and methodsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2849US2024290638A1Deposition or etch chamber with complete symmetry and high temperature surfacesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2947US11798820B2Gas delivery systems and methodsAPPLIED MATERIALS INC·Filed 2020·Granted Oct 24, 2023·0 cites·20 claims
- 3047US2021384015A1Plasma cleaning methods for processing chambersAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3142US2020098547A1Gas distribution assemblies and operation thereofAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3240US10910238B2Heater pedestal assembly for wide range temperature controlAPPLIED MATERIALS INC·Filed 2017·Granted Feb 2, 2021·0 cites·17 claims
- 3340US2019226087A1Heated ceramic faceplateAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →