Inventor · disambiguated record
Kamal Kishore Goundar
Also filed as: GOUNDAR KAMAL KISHORE
10 granted patents·5 pending applications·1,228 citations·filing 2003–2009
92Inventor score
Top patents by PatentIndex Score
15 records- 0198US7632549B2Method of forming a high transparent carbon filmASM JAPAN·Filed 2008·Granted Dec 15, 2009·520 cites·14 claims
- 0296US7498242B2Plasma pre-treating surfaces for atomic layer depositionASM INC·Filed 2006·Granted Mar 3, 2009·554 cites·46 claims
- 0390US6849561B1Method of forming low-k filmsASM JAPAN·Filed 2003·Granted Feb 1, 2005·59 cites·33 claims
- 0484US6991959B2Method of manufacturing silicon carbide filmASM JAPAN·Filed 2003·Granted Jan 31, 2006·32 cites·15 claims
- 0580US6919270B2Method of manufacturing silicon carbide filmASM JAPAN·Filed 2003·Granted Jul 19, 2005·29 cites·16 claims
- 0678US7410915B2Method of forming carbon polymer film using plasma CVDASM JAPAN·Filed 2006·Granted Aug 12, 2008·6 cites·40 claims
- 0771US7138332B2Method of forming silicon carbide filmsASM JAPAN·Filed 2003·Granted Nov 21, 2006·18 cites·26 claims
- 0862US7638441B2Method of forming a carbon polymer film using plasma CVDASM JAPAN·Filed 2007·Granted Dec 29, 2009·1 cites·11 claims
- 0959US2010104770A1Two-step formation of hydrocarbon-based polymer filmASM JAPAN·Filed 2008·Application pending·0 cites
- 1058US2010189923A1Method of forming hardmask by plasma cvdASM JAPAN·Filed 2009·Application pending·0 cites
- 1156US2009246399A1Method for activating reactive oxygen species for cleaning carbon-based film depositionASM JAPAN·Filed 2008·Application pending·0 cites
- 1256US2009297731A1Apparatus and method for improving production throughput in cvd chamberASM JAPAN·Filed 2008·Application pending·0 cites
- 1355US7091133B2Two-step formation of etch stop layerASM JAPAN·Filed 2003·Granted Aug 15, 2006·7 cites·28 claims
- 1455US2009090382A1Method of self-cleaning of carbon-based filmASM JAPAN·Filed 2007·Application pending·0 cites
- 1546US7238393B2Method of forming silicon carbide filmsASM JAPAN·Filed 2003·Granted Jul 3, 2007·2 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →