Inventor · disambiguated record
Kaushik Sah
Also filed as: SAH KAUSHIK
7 granted patents·1 pending application·23 citations·filing 2016–2022
77Inventor score
Top patents by PatentIndex Score
8 records- 0191US10818001B2Using stochastic failure metrics in semiconductor manufacturingKLA TENCOR CORP·Filed 2019·Granted Oct 27, 2020·13 cites·20 claims
- 0286US10699926B2Identifying nuisances and defects of interest in defects detected on a waferKLA TENCOR CORP·Filed 2018·Granted Jun 30, 2020·7 cites·26 claims
- 0366US10540759B2Bonded wafer metrologyKLA TENCOR CORP·Filed 2017·Granted Jan 21, 2020·2 cites·17 claims
- 0463US10068323B2Aware system, method and computer program product for detecting overlay-related defects in multi-patterned fabricated devicesKLA TENCOR CORP·Filed 2016·Granted Sep 4, 2018·1 cites·19 claims
- 0557US12235224B2Process window qualification modulation layoutsKLA CORP·Filed 2022·Granted Feb 25, 2025·0 cites·4 claims
- 0654US12066763B2Sensitivity improvement of optical and SEM defection inspectionKLA CORP·Filed 2021·Granted Aug 20, 2024·0 cites·45 claims
- 0746US2022270212A1Methods for improving optical inspection and metrology image quality using chip design dataKLA CORP·Filed 2022·Application pending·0 cites
- 0841US10598617B2Metrology guided inspection sample shaping of optical inspection resultsKLA TENCOR CORP·Filed 2017·Granted Mar 24, 2020·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →